鐵磁性金屬薄膜在半導體上的製程與磁性研究

本研究中磁性材料選擇鈷，選用矽(100)當作基板。用射頻磁控濺鍍成長鈷及蒸鍍成長紅熒烯，當作改變矽基板表面特性的介面層，在單晶矽(100)上成長鈷/4 nm紅熒烯/矽(100)結構，配合鈷/矽(100)系統的研究，探討紅熒烯加入後對表面與磁性的影響，用原子力顯微鏡觀察表面形貌的變化，與磁光科爾效應的磁探測技術。比較鈷/矽(100)與鈷/4 nm紅熒烯/矽(100)兩個系統，發現在鈷/矽(100)系統中間夾入4 nm紅熒烯，成為鈷/4 nm紅熒烯/矽(100)系統，紅熒烯會減少鈷膜內部的缺陷，導致矯頑力的下降，在此提出4 nm紅熒烯扮演化學中界面活性劑的角色，使鈷薄膜在磁特性表現更好。

關鍵字

鈷；紅熒烯；表面磁光科爾效應；矽

並列摘要

The cobalt is chosen for magnetic material in this research, and silicon (100) uses regard as the base plate. Experiment this utilize the intersection of radio frequency and magnetism accuse of way plated to spatter grow up cobalt, and way plated to steam grow up red glimmering alkene, regard as the interface floor which changes silicon base plate surface characteristic, in mono-crystalline silicon (100) On grow up cobalt /red in 4 nm glimmering alkene / silicon (100) Structure, and then cooperate with early cobalt / silicon (100) in this laboratory The research of the system, canvassing and impact on surface and magnetism after redder glimmering alkene is joined, and the instrument will observe the change of the surface topography of samples with the atom strength microscope, survey technology with the magnetism and magnetism on effect of mere gram. And compare cobalt / silicon (100) at the same time in this research With cobalt / 4 nm red glimmering alkene / silicon (100) Two systems, find the different part is, in cobalt / silicon (100) Insert into 4 nm red glimmering alkene the middle the system, become cobalt / 4 nm red glimmering alkene / silicon (100) The system, red glimmering alkene will reduce the defect within the membrane of cobalt, result in rectifying the decline of stupid strength, we propose here 4 nm red glimmering alkene act the part of active pharmaceutical of chemical interface of China, make cobalt membrane do well in the magnetic characteristic.