光學系統常以金屬薄膜爲反射鏡面,藉以改變光的傳播路徑或接收光訊號,如反射式望遠鏡、高效率發光二極體等。鋁(Al)和銀(Ag)爲最常使用的金屬,並以玻璃或矽爲支撐金屬薄膜的基板,由於金屬膜屬軟膜,常因使用中的擦拭而磨耗,需在金屬膜表面加鍍保護層。本文以電子槍蒸鍍技術,蒸鍍鋁和銀膜於B270之玻璃基板,並以二氧化矽(SiO2)爲保護層,同時爲增加銀膜與B270基板之附著力,於B270基板表面蒸鍍鉻(Cr)。探討不同膜厚下的光學反射率及保護層對反射率之影響,求得最佳之金屬薄膜與保護層厚度,並將實驗量測值與理論計算值相比,獲得相當吻合的結果。再應用奈米壓痕機量測薄膜在不同厚度之硬度與楊氏係數,百格刀檢測薄膜與基板之附著力,藉以瞭解金屬薄膜之機械性質。
In an optical system using a metallic layer as a reflecting mirror, it is common to change the optical path. Aluminum (Al) and Silver (Ag) have been widely used for depositing on a silica-based substrate to form a thin metallic film. In this research, metallic films of Al and Ag are deposited on a B270 substrate by using the electronic-beam vapor deposition technique, being coated with SiO2 on the top surface to protect the metallic film. The effects of the thickness on the reflectance are determined through a parametric study and validated by an experimental measurement. The influence of a protective layer of SiO2 on the reflectivity is also investigated. The mechanical properties and adhesive strength of the metallic film are determined by nanoindentation and an attachment test, respectively.
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