自製傅立葉轉換紅外光譜顯微鏡及其在材料檢測的應用

本論文提出將商業型傅立葉轉換紅外光譜儀之中紅外光源導出，透過自行設計架設的中紅外顯微光路，建置成顯微紅外光譜系統(Micro-FTIR)。本系統提供次釐米(~900 um)的空間解析度，可對微量材料直接進行FTIR光譜量測，同時也可針對大面積 (12 x 12 mm2)材料進行二維紅外光譜影像掃描。我們進一步利用此自製的Micro-FTIR系統進行材料檢測的應用，其中第一主題是矽晶圓的間隙氧的濃度測量，我們提出一個利用本系統測量厚度200 um到2 mm厚矽晶圓間隙氧濃度的方法；第二主題是單根紡織纖維的FTIR測量，我們利用二維紅外光譜掃描影像並辨別不同種類紡織纖維的空間分布，展現我們的micro-FTIR優越的空間解析能力；第三主題是針對有機無機鈣鈦礦材料(Hybrid Organic-Inorganic Perovskite)的FTIR光譜量測，從FTIR光譜的特徵峰可以清晰辨別有機無機鈣鈦礦材料的有機部位為Formamidinium (FA)或是Methylammonium (MA)。我們認為此自製的顯微紅外光譜系統將成為實驗室新穎材料物性研究的關鍵技術。

關鍵字

傅立葉轉換紅外光譜；顯微紅外光譜系統；二維紅外光譜掃描；間隙氧；有機-無機鈣鈦礦

並列摘要

In this thesis, we report the construction of a Micro-FTIR system based on a commercial FTIR spectrometer. This home-built Micro-FTIR system offers sub-millimeter spatial resolution (~900 um) and large mapping area (12x12 mm2) for FTIR microscopy. We use this Micro-FTIR system for three topics: (a) The characterization of interstitial oxygen in silicon wafer, where we developed an analysis method to characterize the Oi content of silicon wafer in various thicknesses ranging from 200 um to 2 mm; (b) Spatially resolving entangled fabric fibers, where we demonstrated different types of fabric fibers can be distinguished by FTIR mapping and further confirmed the spatial resolution of our system; (c) The investigation of hybrid organic-inorganic perovskite (HOIP), where the spectral features originated from the organic part (Formamidinium, FA or Methylammonium, MA) of four organic perovskite samples FA(MA)PbI3 and FA(MA)PbBr3, can be clearly distinguished. We believe that this home-built Micro-FTIR system will become a powerful optical tool to characterize emergent materials in our laboratory.

並列關鍵字

FTIR ； Micro-FTIR ； 2D-FTIR mapping ； Interstitial Oxygen ； Hybrid Organic-Inorganic Perovskite

參考文獻

[18] Michael Saliba, Taisuke Matsui, Ji-Youn Seo, Konrad Domanski, Juan-Pablo Correa-Baena, Mohammad Khaja Nazeeruddin, Shaik M. Zakeeruddin, Wolfgang Tress, Antonio Abate, Anders Hagfeldt and Michael Gratzel, “Cesium-containing triple cation perovskite solar cells: improved stability, reproducibility and high efficiency,” Energy Environ. Sci., 9, 1989-1997, (2016)

[1] Griffiths, David J., “Introduction to Electrodynamics,” 3rd Edition, Pearson Education, (2007)

[2] K-P Möllmann and M Vollmer, “Fourier transform infrared spectroscopy in physics laboratory courses,” Eur. J. Phys., 34, S123-S137, (2013)

[5] Peter Fellgett, “On the ultimate sensitivity and practical performance of radiation detectors,” J. Opt. Soc. Am. OSA., 39 (11), 970–976, (1949)

[6] P. Jacquinot, “New developments in interference spectroscopy,” Rep. Progr. Phys., 23, 267, (1960)

國際替代計量

自製傅立葉轉換紅外光譜顯微鏡及其在材料檢測的應用

全文下載

主題瀏覽