受紫外光照射之聚苯乙烯薄膜與雙層膜表面的破裂波紋

Fracture-induced ripple patterns on the surface of UV-irradiated polystyrene thin films and bilayered films

林昂櫻(Ang-Ying Lin)

指導教授 ： 李三保

國立清華大學/工學院/材料科學工程學系/碩士(2014年)

https://doi.org/10.6843/NTHU.2014.00368

摘要

破裂引發微結構的形成方式是藉由分離三明治結構試片的上下基板，使夾層的高分子薄膜破裂成一組互補的非對稱破裂波紋在兩基板表面。
在實驗(一)中，我們採用拉伸與劈裂的方式在低分子量聚苯乙烯薄膜上引發週期性破裂波紋。接著，我們進一步探討不同紫外光劑量對聚苯乙烯薄膜之破裂波紋的表面形貌的影響。而在實驗(二)中，我們採用高分子量的聚苯乙烯來討論分子量的差異對於劈裂引發之破裂波紋的影響。為了排除高分子量聚苯乙烯中的雜質與添加物，我們以沉澱分級的方式加以純化，並觀察純化前後對破裂引發波紋的影響。最後.在實驗(三)中我們採用低分子量聚苯乙烯與光阻形成雙層膜的三明治試片。以劈裂方式分離試片後，觀察試片表面破裂引發結構在單層膜與雙層膜之情況下的差異。
由實驗結果可知，破裂波紋的波長與對應的膜厚呈線性關係，且與採用的破裂方式無關。而對於兩種破裂方式來說，波長對膜厚的比率皆隨照射劑量增加而減少。此外，高分子材料的種類與分子量的差異也會對破裂波紋產生影響。

關鍵字

破裂波紋 ； 紫外光 ； 聚苯乙烯 ； 光阻

並列摘要

The fracture-induced structure (FIS) can be formed by separating the sandwich structure specimen. The film was fractured into two complementary set of nonsymmetrical cracked ripples on substrates.
In experiment I, we used the tension-splitting and peeling–splitting method to induced periodic ripples on low molecular weight polystyrene (PS) films. Then we investigated the effect of UV (ultraviolet) irradiation on the surface modulation of FIS for PS films. Next, we used high molecular weight PS as the material to discuss the effect of the different molecular weight on surface gratings by peeling–splitting method in experiment II. In order to remove impurities and additives from high molecular weight PS pellets, we used fractional precipitation method and observed the difference in FIS without and with fractional precipitation. Finally, we used low molecular weight PS and photoresist to form the bilayered film sandwiched by two silicon substrates in experiment III. After separating by peeling–splitting, we investigated the difference between monolayer and bilayer situation for fracture-induced structure.
The spatial wavelength of the surface structures is a linear function of the film thickness which is independent of the splitting approaches. For both two splitting processes, the ratio of the spatial wavelength to the film thickness decreased with the increase of irradiation dose. Besides, the different kinds of polymers and molecular weight also have the effect on cracked ripples.

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