整合型表面聲波感測器之設計與應用

在現今的通訊領域中，表面聲波元件已大量被製作為高品質因素的濾波元件。此外，基於材料之特性與波傳之機制，利用表面聲波元件製作之各項感測器也漸漸受到重視。在本論文中係利用雙埠表面聲波元件來製作皮爾斯型式的振盪器。其表面聲波元件之中心頻率與插入損耗分別為157MHz和-19.4dB。在製作完成後的振盪器其振盪頻率與輸出功率分別為157.224MHz與19.13dBm。並配合商用混頻器，進行整合型表面聲波感測器之製作與量測，而其量測結果中頻之輸出端為1.81dBm@575KHz。此外，在論文中亦進行表面聲波元件之感測實驗，包含溫度感測器實驗、濕度感測器實驗，各項實驗之流程與結果將在本文中做進一步的討論。在論文末了的部分，則是利用CMOS製程之放大器製作表面聲波振盪器，並進行最後之總結。

關鍵字

微機電電路；射頻電路；表面聲波元件；感測器

並列摘要

In modern communication system, surface acoustic wave (SAW) devices have been used as high quality factor filters. In addition, according to the characteristic of material and the wave propagation of the SAW devices, the sensors based on it was developed and attracted with people nowadays. In the thesis, a Pierce-type oscillator using two-port SAW device is presented. The center frequency and the insertion loss of SAW device are 157MHz and -19.4dB respectively. The output frequency and power of oscillator using SAW device is 157.224MHz and -19.13dBm respectively. Moreover, the output power of SAW integration sensor after frequency differentiation is 1.81dBm@575KHz. Furthermore, in this thesis, SAW oscillator will be designed for the sensing experiments, such as temperature sensing and humidity sensing. The detail of the experiments and results will be discussed in the section later. For the end of the thesis, the SAW oscillator with CMOS amplifier was fabricated. Finally, the conclusion will be summarized in the thesis.

並列關鍵字

RF circuit ； SAW device ； MEMS circuit ； sensor

參考文獻

[33] 黃聖閔, 整合型表面聲波陣列感測器之研究, 中原大學電子工程所碩士論文, 2003

[32] 邱佳松, 高頻聲波振盪器之研究與應用, 中原大學電子工程所碩士論文, 2002

[6] 吳至軒, 高品質氮化鋁薄膜及其表面聲波元件之研製, 中原大學碩士論文, 2001.

[3] J. W. Gardner, V. K. Varadan, O. O. Awadelkarim, Microsensors MEMS and Smart Devices, Wiley-interscience, New York, pp.303-306, 2001.

[1] Jacob Fraden, Handbook of Modern Sensors Physics, Designs, and Applications, Springer-Verlag New York, Inc, 1996

國際替代計量

整合型表面聲波感測器之設計與應用

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