在多孔矽基板上鍍不同金屬材料以電鍍法和旋塗法成長氧化鋅奈米柱

Synthesis of Zinc Oxide Nanostructures on Porous Silicon and Meta Substrates by Electroplating and Spin Coating Methods

陳芊酉(Chian-You Chen)

指導教授 ： 陳祥

國立暨南國際大學/科技學院/應用材料及光電工程學系/碩士(2017年)

摘要

在這篇論文中，我們使用電子鎗真空蒸鍍系統（E-Gun System）在多孔矽（PS）的基板上分別鍍上金薄膜、銀薄膜，再進一步使用電鍍法和水熱法兩種方法成長氧化鋅奈米柱在鍍金和鍍銀的多孔矽基板上，根據結果，對氧化鋅奈米柱的樣品做材料特性的量測與結構分析。除此之外，進一步製作在多孔矽（PS）基板上分別先滴石墨烯溶液再成長氧化鋅奈米柱與混合石墨烯溶液和氧化鋅晶種層後再成長氧化鋅奈米柱的實驗，比較上述兩者氧化鋅奈米柱的材料特性與結構分析。樣品的量測與分析測試時，以掃描電子顯微鏡（SEM）、X-光繞射儀（XRD）、X射線光電子能譜儀（XPS）、原子力顯微鏡（AFM）、光致螢光光譜儀（PL）等儀器做測試。電鍍法成長氧化鋅奈米柱時間較快，但旋塗法成長的氧化鋅奈米柱結晶度較好，多孔矽鍍銀所成長的氧化鋅奈米柱有較好的光催化活性。石墨稀參雜氧化鋅奈米柱比較，石墨稀混合氧化鋅具有較高的綠色發射強度，有大的缺陷密度結構，使得氣體傳感器的靈敏度增加，此外，有較佳的抗菌特性。這些結果可以應用於半導體、高效光電元件、氣體和生物感測器。

關鍵字

氧化鋅 ； 奈米 ； 多孔矽 ； 銀 ； 金 ； 旋塗 ； 電鍍

並列摘要

In this thesis, ZnO nanostructures were deposited on metal-coated porous silicon substrates. The coated metal consisting including silver (Ag) film and gold (Au) film was deposited by E-Gun System on porous silicon (PS) substrates. Then, ZnO NRs were grown on the substrate by electrochemical and spin coating methods. In addition to metal coating, to vary the characteristics of the nanocomposites, graphene was also incorporated in the fabrication process. ZnO/graphene hybrids were deposited on the PS substrates. These nanostructures were characterized by scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy, Atomic Force Microscope, Photoluminescence emission spectroscopy. However, growing ZnO nanostructures by spin coating methods showed better crystallinity. Moreover, compared with graphene/ZnO and.ZnO–graphene hybrids, PL spectra revealed higher intensity of defect luminescence for ZnO–graphene hybrid nanostructures which could be due to mixture in ZnO. Furthermore, ZnO–graphene hybrids had better antibacterial behavior than those ZnO/graphene structures. The structure design is promising for future applications of semiconductor and metal coupling to form highly efficient optoelectronic devices and biosensors.

並列關鍵字

ZnO ； nanostructures ； porous silicon ； Ag ； Au ； graphene ； spin coating

參考文獻

參考文獻

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[4] T. C. Damen, S. P. S. Porto, and B. Tell, "Raman Effect in Zinc Oxide," Physical Review, vol. 142, pp. 570-574, 1966.