具混合式反射鏡共振腔氮化鎵面射型雷射之研究

Study of Nitride-Based Vertical-Cavity Surface Emitting Lasers with Hybrid Mirrors

高志強(Chih-Chiang Kao)

《光學工程》 101期 (2008/03) Pp. 36-43

https://doi.org/10.30011/OE.200803.0003

摘要

在本研究中，我們發展了具混合式反射鏡共振腔之氮化鎵光激發面射型雷射的製作方法且研究了其雷射特性。其雷射之臨界激發能量約為2.6 mJ/平方公分，所輻射波長為456.2nm且半高寬僅僅0.2nm，其極化程度與發散角可分別達到84%與7.6度。經實驗，此雷射的自發輻射耦合率可達一般邊射型雷射的1,000倍之高，且其電元件之發光波長落於463.2nm，於10微安時，其半高可達至0.52nm，此研究結果顯示此元件在雷射應用具有極高之潛力與價值。

關鍵字

氮化鎵 ； 雷射 ； 面射型雷射 ； 微共振腔

並列摘要

In this study, we have demonstrated the fabrication and characteristics of the optically-pumped nitride-based vertical cavity surface emitting laser (VCSEL) with hybrid mirrors. The laser action was observed at room temperature with a threshold pumping energy density of about 2.6mJ/cm^2. The GaN VCSEL emits 456 nm blue wavelength with a linewidth of 0.2nm and the laser beam shows a large degree of polarization of about 84%, a high characteristic temperature to be about 244K, and a small divergence angle to be about 7.6°. The coupling efficiency of spontaneous emission of the VCSEL was estimated to be a thousand times higher than that of the typical edge emitting lasers. We also electrically pumped the VCSEL sample, and the fabricated device shows a very narrow emission peak centered at 465.3nm with a linewidth of 0.52nm at a driving current of 10mA. These results adequately reveal GaN VCSEL has a promising potential on the laser application.

並列關鍵字

GaN ； laser ； VCSEL ； micro-cavity