自發性電化學蝕刻法製備矽奈米線陣列對有機溶劑氣體感測之研究

Using Electroless Etching Method to Fabricate Silicon Nanowires Array for Sensing Volatile Organic Solvents Vapor

程金保(Chin-Pao Cheng) ； 宋蕙伶(Hui-Ling Sung) ； 孫永翔(Yung-Hsinag Sun)

《真空科技》 26卷1期 (2013/03) Pp. 63-69

摘要

本研究利用自發性電化學蝕刻方式製備矽奈米線陣列，透過改變蝕刻時間來製作不同長度的矽奈米線，並將其應用於有機溶劑氣體之感測。實驗結果發現，蝕刻時間增加，矽奈米線長度也會隨之增加。且對於有機溶劑氣體感測之靈敏度，也隨著線長愈長而靈敏度愈好。本研究中並討論有機溶劑氣體分子與矽奈米線表面的反應性，我們選用不具有極性且沒有孤對電子的正戊烷、與生活中常見的丙酮和乙醇作為待測有機溶劑。丙酮與乙醇均具有極性，乙醇具有由OH官能基所產生的分子間氫鍵，而丙酮不具氫鍵但含有羰基（C=O），研究結果顯示矽奈米線對含有羰基之丙酮有最好的反應性及感測靈敏度，乙醇次之，而對於正戊烷氣體則感測效果不佳。

關鍵字

矽奈米線 ； 有機溶劑 ； 無電化學蝕刻 ； 羰基

並列摘要

Herein we report the preparation of silicon nanowires by using the electroless chemical etching method. Different lengths of silicon nanowires array can be obtained by changing the etching time. These arrays are used as sensors in detection of volatility organic solvents. We can obtain the longer length of silicon nanowires by increasing the etching time. The sensitivity of organic solvents will be increased depending on the length of silicon nanowires. We choose pentane, ethanol and acetone as the organic solvents and report the reactivity between that and silicon nanowires. Pentane is a nonpolar solvent. There are hydrogen bonds between ethanol molecules causing by the OH functional group and carbonyl group was contained in acetone molecule. Both of these solvents are to be provided with polar. We can obtain the results in good reactivity and sensitivity of acetone which is containing carbonyl group.

並列關鍵字

Silicon Nanowires ； Organic Solvents ； Electroless Chemical Etching ； Carbonyl Group