利用飛秒雷射微奈米加工技術於玻片上製作高深寬比之微流道結構

Fabrication of High-Aspect-Ratio Microfluidic Channels on Glass Using Femtosecond Pulsed Laser Micro and Nano Machining Technology

李銘峯(Ming-Feng Li) ； 許芳文(Fang-Wen Sheu) ； 吳秉翰(Ping-Han Wu) ； 蘇信嘉(Hsin-Chia Su) ； 曹宏熙(Hong-Shi Cao) ； 胡杰(Chieh Hu)

《科學與工程技術期刊》 5卷4期 (2009/12) Pp. 49-55

https://doi.org/10.7117/JSET.200912.0049

摘要

我們利用中心波長爲800nm、脈衝寬度爲115fs、重複率爲1kHz的摻鈦藍寶石飛秒雷射，於玻片表面上進行微流道加工。我們依照不同的雷射功率、掃描速度、掃描次數等參數，觀察其雷射加工光斑大小、熱影響區、加工深度與加工寬度之關係。根據實驗參數曲線趨勢與流道截面觀察結果，我們在雷射加工功率爲65mW、掃描速度爲0.8mm/s，於相同加工線段重複掃描7次後，可成功製作出高深寬比(6.5:1)、流道管壁筆直且互爲平行的結構，其流道表面粗糙度可小於1μm。此飛秒雷射微奈米加工技術可於日後應用於在玻片上製作微奈米等級元件，如分散布拉格反射鏡、光子晶體元件、微流道生物晶片與高精密干涉式生物光學感測器等，使其加工精密度與穩定性提高，並可簡化其製程步驟、縮短其製程時間。

關鍵字

飛秒雷射 ； 雷射加工光斑 ； 熱影響區 ； 微流道 ； 高深寬比

並列摘要

A Ti:sapphire femtosecond laser with a center wavelength of 800 nm, a pulse duration of 115 fs, and a repetition rate of 1 KHz was used to fabricate microfluidic channels on the surface of a glass plate. The scribing laser spot size, heated zone size, scribing depth, and scribing width were investigated as a function of the pulse energy, scanning speed, and repeated number. According to the curve trend of the tested parameters and the result of cross-sectional channel inspection, we successfully achieved the fabrication of high-aspect-ratio (6.5:1) channels with straight and parallel walls of which the surface roughness was smaller than 1 μm by using a laser power of 65 mW, a scanning speed of 0.8 mm/s, and a repeated number 7 times. In the future, micro and nano machining technology by femtosecond lasers can be applied to the manufacturing of micro and nano structured components on glass, such as distributed Bragg reflectors, photonic crystal devices, microfluidic channel biochips, and high precision interferometric biophotonic sensors. Such application can promote the processing precision and stability, simplify the fabrication steps, and shorten the manufacturing time.

並列關鍵字

femtosecond laser ； scribing laser spot ； heated zone ； microfluidic channels ； high-aspect ratio