Title

奈米碳管透明導電膜之研究

Translated Titles

The Investigation in Transparent Conductive Film of Carbon Nanotube

Authors

李致廷

Key Words

單層奈米碳管 ; 靜電吸附 ; 自組裝 ; 透明導電膜 ; 圖案 ; single-walled carbon nanotubes ; electrostatic absorption ; self- assembling ; transparent conductive film ; pattern

PublicationName

中興大學精密工程學系所學位論文

Volume or Term/Year and Month of Publication

2012年

Academic Degree Category

碩士

Advisor

薛英家

Content Language

繁體中文

Chinese Abstract

本論文研究逐層靜電吸附自我組裝(Layer-by-Layer, LBL)製程和不同時間酸處理的單層奈米碳管(Single-walled Carbon Nanotubes, SWNTs),去優化以製作最佳的奈米碳管透明導電膜。 除此之外,透過微影、LBL和掀離製程製作不同覆蓋率的奈米碳管透明導電膜,以期能夠提高它的穿透度。 因LBL法可控制成膜的流程,選定不同層數的單層奈米碳管導電膜產生不同的穿透度和片電阻,以符合電阻式和電容式觸控面板在應用上對於透明導電膜的規格需求。 關鍵字:單層奈米碳管、靜電吸附、自組裝、透明導電膜、圖案

English Abstract

The investigation of this thesis is by using so-called Layer-by-Layer (LBL) process and different acid treatment time in purified process for Single-walled Carbon Nanotubes (SWNTs). With optimized process based on both LBL and acid-treatment, the transparent conductive film of SWNTs was made of the best process of LBL process in different acid treatment time. In addition, in order to improve its transmittance, the LBL, and lift-off process was used to deposit different coverage ratio of transparent conductive film of SWNTs through lithography. Because of film formation process could be controlled by LBL method, the selected SWNTs films were produced with different transmittances and sheet resistances to meet the specification of transparent conductive film for both applications of resistive or capacitive touch panel. Keyword:single-walled carbon nanotubes、electrostatic absorption、self- assembling、 transparent conductive film、pattern

Topic Category 工學院 > 精密工程學系所
工程學 > 工程學總論
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