capacitance region. When field effect transistors operate in negative capacitance region, the field-effect transistor (c) The process flow of a planar ferroelectric field-effect
) [6] and negative capacitance FETs (NCFETs) [7]to enhance the integration density and : Negative-capacitance MOSFET.7
power. The ferroelectric field-effect transistor (FeFET), the focus of this study, possesses -based ferroelectric field-effect transistor (FeFET), considering device-to-device
the top-gatefield effect transistor, on/off current ratio of nearly 105 orders of -semiconductor field effect transistor to study the electrical characteristics[30].1.3 Organization
= 5 kHz0246810CET (nm)This work 2018 EDL[29]7 nm HfO210 nm Al2O3(b)doi:10.6342 ]: 7 nm HfO2Dit (cm-2eV-1)E-Ev (eV)-2-10120.00.20.40.610 nm Al2O3(a)CGC (F
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