本文旨在提出用電容位置感測器於電磁致動器。當它對於間距並不會那樣敏感時,可以直接嵌入於致動器的結構。本文提出各種適合位置控制於線、旋轉和表面的電容感測器幾何的設計與發展。此種設計相當簡單、強健、便宜且適合於大量生產,原型感測器已經使用在印刷電路板的技術。電容與電壓的轉換利用相位鎖迴路積體電路。其量測結果於本文中探討。
This paper presents a capacitive position sensor for electromagnetic actuator. The sensor can be embedded directly into the structure of the actuator as it is less sensitive to the variation of the gap. Design and development of various embedded capacitive sensor geometries that are suitable for position control of linear, rotary and surface actuators are presented. Designs are simple, robust, cheap and suitable for mass production. Prototypes of the sensor have been realised using printed circuit board technique. The capacitance to voltage conversion was implemented using a phase locked loop integrated circuit. The measured results of the developed capacitive sensor prototypes are discussed.