- 期刊
Ultra-Precision Angle Measurement based on Michelson Interferometry
一種基於麥克森干涉術的高精度角度感測器
摘要
本篇論文提出一種基於麥克森干涉術，利用極化分光原理與四個光感測器陣列原理的角度感測器。移動鏡的角度變化會造成兩道反射光彼此的光程差變化形成干涉。光感測器可以接收相位差90°的訊號。藉由相位計數和相位細分處理可以計算出角度的移動量。此外，提出的結構也是一種微型化的設計，整體光學架構的面積僅有45 mm×45 mm。為了要便於調整光學元件彼此的對位和改善訊號品質，提出一種機械夾持式的治具使微小的光學元件可以彼此夾緊沒有空氣層。實驗結果得知解析度可到0.01角秒，在±120角秒量測範圍內精度小於0.2角秒
關鍵字
無資料並列摘要
A homodyne interferometer exploits the polarizing theory and four-detector-array based on Michelson interferometry is proposed for angle measurement. The angular displacement of the object mirror will cause the optical path difference between the two reflected beams so as to produce interference. The quadrature signals with 90° phase shift will be collected by photo-detectors. With pulse counting and phase subdivision processing the angular movement can be calculated. The proposed structure is also featured by its miniature design. The optical system is only 45 mm by 45 mm in area. In order to facilitate the alignment of optical components and improve the signal quality, a new optical bonding technology by mechanical fixture is proposed so that the miniature optics can be permanently pressed together without air gap in between. Experiments show that the resolution is 0.01” and the accuracy is less than 0.2” for the measurement range of ±120 arc seconds.