- 期刊
Microwave Sintering of a Combustion Synthesized AIN Powder
燃燒合成氮化鋁粉體之微波燒結
摘要
本論文主要在探討燃燒合成法合成之氮化鋁粉體，利用微波燒結的性質，合成的方法是由本論文成功大學的作者所開發，這個方法同時具備有製程簡易、生產快速、低成本、轉化率高以及適合量產等優點。本實驗用的粉體係合成之後分別研磨成0.9μm(代號AIN-1)及3.0μm(代號AIN-2)兩種粒徑，燒結助劑為氧化釔。整個微波燒結的實驗是在美國賓州州立大學的微波製程與工程中心進行。試片是利用頻率2.45GHz的多模腔進行燒結，功率是200到1000瓦，燒結的溫度介於1600℃與2000℃之間。AIN-1粉體添加3-5 wt%的氧化釔在1800℃下持溫30分鐘，其燒結密度可達理論值的99%；AIN-2粉體添加5 wt%的氧化釔在2000℃下持溫30分鐘，其燒結密度可達理論值的97.3%，而這兩個條件的試片熱傳導值分別可達122及132 W/m‧K。本論文同時探討幾個重要變數對試片熱傳導值的影響。
關鍵字
無資料並列摘要
We report our preliminary study on microwave sintering of a combustion synthesized AIN powder. The combustion synthesis method was previously developed by Chung et al. at National Cheng Kung University, and is characterized by simple processing, fast production, low cost, high product purity, and being capable of mass production. The AIN product obtained from this synthesis method was ground to have average particle sizes of 0.9μm (AIN-l) and 3.0μm (AIN-2) for sintering experiments. Yttrium oxide was added to the AIN powder as sintering aid. The microwave sintering experiments were carried out at the Microwave Processing and Engineering Center in the Pennsylvania State University. The samples were sintered by microwave at 2.45 GHz in a multi-mode cavity. The power used ranged from 200W to 1 kW, and the sintering temperature ranged from 1600°C to 2000°C. The AIN-1 powder was sintered to ~99% of theoretical density at a sintering temperature of 1800°C with a soaking time of 30 min and a Y2O3 content of 3-5 wt%. The AIN-2 powder was less sinterable than AIN-1 and 97.3% of theoretical density was obtained at sintering temperature of 2000°C with a soaking time of 30 min and a Y2O3 content of 5 wt%. The thermal conductivities reached 122 and 132 W/m‧K for the specimens made from AIN-1 and AIN-2, respectively, when 5 wt% of Y2O3 was added. Effects of several important parameters on the thermal conductivity were discussed.