AFM, EDS and XRD Microstructural Characterizations of Pd-Ag/PSS Membranes

以AFM, EDS及XRD分析Pd-Ag/PSS膜微結構特性

林文雄(Wen-Hsiung Lin) ； 張新福(Hsin-Fu Chang)

《Journal of the Chinese Institute of Chemical Engineers》 37卷3期 (2006/05) Pp. 239-247

https://doi.org/10.6967/JCICE.200605.0239

摘要

本研究以連續無電鍍製程，在孔洞不鏽鋼底材析鍍緻密、無孔洞鈀膜及鈀銀合金膜，以掃瞄式電子顯微鏡(SEM)、能量分散光譜(EDS)、原子力顯微鏡(AFM)及艾克斯繞射光譜(XRD)探究膜之特性。由AFM圖譜得知：無電鍍製程中，析鍍速率較慢，則具有較小析鍍層粗糙度；由EDS圖譜了解：藉由連續無電鍍鈀及銀之析鍍程序，製備鈀銀合金膜鍍層，其表層及底材孔洞內之組成是一致的；由XRD圖譜顯示：鈀及銀之特性波峰可藉由鍛燒程序，成為單一特性波峰，並藉由波峰位置及平均晶格距離之關係，得知合金膜之組成。

並列摘要

In the present investigation, dense, defect free palladium and palladium-silver alloy membranes were prepared on porous stainless steel by means of the sequential electroless plating technique. Full characterizations of the Pd-Ag/PSS membranes were performed using scanning electron microscopy (SEM), energy dispersive spectroscopic analysis (EDS), atomic force microscopy (AFM), and an X-ray diffractometer (XRD). AFM images showed that in the electroless plating process, lower skin layer roughness and a lower deposition rate were related. Although deposition was conducted through a sequential process, the surfaces on or inside the substrate showed homogenous deposition, as determined through EDS analysis. XRD reflection peaks indicated that the palladium and silver together formed a homogeneous alloy after annealing. The relationship between the average lattice spacing and peak positions can be used to estimate the membrane composition.

並列關鍵字

Sequential electroless plating ； Pd-Ag/PSS membrane ； Scanning electron microscopy ； Energy dispersive spectroscopic analysis ； Atomic force microscopy