本研究選定SKH51、SUS316兩種材料,施以離子氮化處理。過程中設立四個變數:爐氣成份(N_2/H_2比)、處理壓力、處理溫度和處理時間。探討該等變數對氮化層之影響。經離子氮化處理後,分別施行機械性質測試與氮化層組織結構之觀察分析。氮化層經由各項分析之結果:X-ray繞射分析,證實表面含有ε-Fe_(2-3) N與γ'-Fe_4N結構物存在。AES分析,證實表面含有N-元素之存在。TEM分析,發現在[001]方向具有fcc氮化物之存在,SKH51為γ'-Fe_4N-,SUS 316為γ'-Fe_4N與CrN結構物。
High speed steel SKH51, Stainless steel SUS 316 are selected for Ion Nitriding under varying process conditions. The process variables studied include time, gas composition, pressure and Temperature. The specimens, after nitriding treatment, have been examined using microhardness-depth correlation, friction and wear measurment. The nitrided layers were investigated by X-ray diffraction analysis, Auger electron spectroscopy, EPMA analysis, and transmission electron microscopy. Transmission electron microscopy results show that the nitride precipitates can be characterized as platelets on [001] matrix planes. These precipitates occur in SKH61 is r'-Fe_4N, and occur in SUS316 are r'-Fe_4N and CrN.