摘要
本篇文章以高功率脈衝磁控濺鍍（High Power Impulse Magnetron Sputtering, HiPIMS）技術製備氧化物／金屬／氧化物（Oxide/Metal/Oxide, OMO）三明治結構之透明導電薄膜，並探討OMO透明導電層的光學與電學性能以及其應用在穿戴式生物感測裝置及透明顯示器之潛力。在OMO三明治結構中，中間Ag層顯著降低片電阻，並透過上下氧化層的抗反射效果提升穿透率。此外，三明治結構殘留應力低且透過HiPIMS技術沉積具有優異的附著力。本研究將ITO/Ag/ITO透明導電薄膜應用於兩種元件，包括具有垂直型紅外發光二極體（light-emitting diode，LED）的柔性生物感測器以及透明微型LED（micro-LED）顯示器，發現ITO/Ag/ITO結構具備卓越的柔性與耐用性，在經過5000次彎曲測試後，片電阻變化在10%以內。HiPIMS製備之ITO/Ag/ITO三明治結構在透明導電應用上展現出高穿透率、高亮度輸出及穩定的電流分佈能力，且符合健康監測的國際標準（AAMI SP10/ISO 81060-2:2009），透明micro-LED最高光輸出功率達1.38mW，平均穿透率超過80%，顯示出HiPIMS製備OMO三明治結構透明導電薄膜在穿戴式裝置及新型透明顯示器應用中具有極大的發展潛力。
並列摘要
This study employs High Power Impulse Magnetron Sputtering (HiPIMS) to fabricate oxide/metal/oxide (OMO) sandwich-structured transparent conductive films, investigating their optical and electrical properties as well as their potential applications in wearable biosensor and transparent micro-LEDs. In the OMO structure, the middle Ag layer significantly reduces sheet resistance, while the anti-reflective effects of the top and bottom oxide layers enhance transmittance. Additionally, the sandwich structure exhibits low residual stress and excellent adhesion owing to the HiPIMS deposition process. This study applied ITO/Ag/ITO transparent conductive films to two types of devices: a flexible PPG biosensor with a vertical-type infrared LED and a transparent micro-LED display. The ITO/Ag/ITO structure demonstrated outstanding flexibility and durability, with sheet resistance variations within 10% after 5000 bending cycles. The HiPIMS-fabricated ITO/Ag/ITO sandwich structure exhibited high transmittance, high brightness output, and stable current distribution, meeting international health monitoring standards (AAMI SP10/ISO 81060-2:2009). The transparent micro-LED achieved a peak optical output power of 1.38 mW, with an average transmittance exceeding 80%. These results highlight the great potential of HiPIMS-fabricated OMO sandwich-structured transparent conductive films for applications in wearable devices and next-generation transparent displays.