飛秒雷射在材料微細加工的應用

Femtosecond Laser and Its Applications in Micromachining

鄭中緯(Chung-Wei Cheng)

《科儀新知》 164期 (2008/06) Pp. 27-32

https://doi.org/10.29662/IT.200806.0003

摘要

為解決長脈衝雷射因脈衝時間過長，材料加工時會產生顯著熱效應及影響精度問題，國際研究單位已積極投入飛秒雷射之加工技術開發。目前飛秒雷射囿於產能，不易成為量產製程設備，但國際研究方向為開發高精度、高速度之飛秒雷射加工技術，以解決現有技術瓶頸。本文主要針對飛秒雷射之材料加工機制作介紹，並說明飛秒雷射在透明介質材料內部、金屬材料及透明導電薄膜之微細加工的應用。

並列摘要

To overcome the large heat-affected zone and low accuracy caused by conventional long pulse duration lasers, the worldwide research institutes have paid attention to develop the femtosecond laser machining technologies. However, the current performance of femtosecond laser machining is limited by the low throughput, and the high-accuracy and high-speed femtosecond laser machining technologies are being developed in order to overcome these disadvantages. This paper describes the mechanisms of femtosecond laser micromachining. Also, the advanced applications of femtosecond laser micromachining in internal transparent, metal and thin film transparent conductor materials are introduced.