原子層沉積製程技術於奈米觸媒應用

Applications of Atomic Layer Deposition on Fabrication of Nano-Catalysts

柯志忠(Chi-Chung Kei) ； 王致傑(Chih-Chieh Wang) ； 薛仰志(Yang-Chih Hsueh) ； 彭宗平(Tsong-Pyng Perng)

《科儀新知》 185期 (2011/12) Pp. 12-22

https://doi.org/10.29662/IT.201112.0002

摘要

隨著天然資源耗竭與過度工業化造成全球暖化加劇，開發高轉換效能燃料電池與再生能源成為人類能否持續發展之重要課題，本研究提出利用原子層沉積 （atomic layer deposition, ALD）技術製作奈米觸媒，應用於質子交換膜燃料電池與光催化反應及水解產氫。ALD技術具極佳鍍膜表面覆蓋率及厚度控制，在奈米材料領域有極大吸引力，本研究團隊突破ALD用來製備薄膜之傳統概念，製作燃料電池所需Pt奈米顆粒觸煤，並以僅為商用電極Pt擔載量之1/30即可獲得相近之燃料電池特性，有利於未來燃料電池商品化。此外，本團隊亦利用奈米模板製作TiO（subscript 2）奈米管陣列，並獲得極佳之光催化特性，而初步研究亦顯示TiO（subscript 2）奈米管具有良好之水解產氫效能。

並列摘要

Developments of high conversion-efficiency fuel cell and renewable energy are important to solve the problems arisen from the fast consumption of natural resources and global warming due to industrialization. In this study, atomic layer deposition (ALD) is proposed to fabricate nano-catalysts for proton exchange membrane fuel cell (PEMFC), photocatalysis and water splitting for hydrogen generation. ALD offers good coating conformity over complicated substrates with atomic scale thickness control. Platinum nanoparticles prepared by ALD were used as the catalyst for PEMFC. Compared with commercial electrode, only one thirtieth amount of platinum loading could achieve similar performance of PEMFC. The reduction of platinum loading can enable and accelerate the commercialization of PEMFC. Besides, TiO(subscript 2) nanotubes prepared by using ALD technique and anodized aluminum oxide template have excellent performance of photocatalysis. Preliminary study also shows that the TiO(subscript 2) nanotubes can be a good catalyst of water splitting to generate hydrogen with the aid of solar energy.