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以高解析穿透式電子顯微鏡搭配電子能量損失譜儀重構元素電子、鍵結、成份空間分布
Rebuilt Space Distribution of Electronic Properties, Bonding Status and Element Compositions by Electron Energy Loss Spectrometer in Transmission Electron Microscopy
摘要
本文主要介紹電子能量損失譜儀（EELS）的工作原理，以及不同能譜區間能提供哪些之資訊，並比較傳統穿透式電子顯微鏡中常用的成份分析工具X射線能量散布分析儀（EDS）的差異。在成份分析中EELS可提供更準確的低原子序元素成份定量，且由元素特徵峰波形的差異可分析成份鍵結方式；此外在較低能量電漿峰區域更能藉此分析區域的電子性質，包含能隙形式、大小以及介電性質差異。最後，本團隊展示應用電子能量損失譜儀解析機制的三個研究，銅奈米線電阻式記憶體、奈米螺旋二硒化鉬陣列鋁離子能量儲存電池陰極充放電機制、鹼金屬摻雜控制銅銦鎵硒薄膜太陽能電池薄膜成長。
關鍵字
無資料並列摘要
In this article, we introduce the working mechanism of electron energy loss spectrometer (EELS) in transmission electron microscopy (TEM) and the differences compared with energy-dispersive X-ray spectrometer (EDS), which is traditional composition analysis method used in TEM. For the composition analysis, the EELS can not only provide more accurate composition quantification of elements with lower atomic number but also distinguish the bonding type by shape of characteristic peaks. Besides, we can know the electronic characteristics, such as band gap and dielectric difference at atomic scale measured positions at plasmon peak region. Furthermore, three cases measured by EELS were demonstrated, including in-situ current-accelerated phase cycling with metallic and semiconducting switchings in copper nano-belts, the working mechanism of MoSe_2 spiral nanorods array as cathode in Al ions energy storage battery, and the diffusion of alkaline elements in CIGS thin film solar cell.