- 期刊
新穎性TiO2-WO3複合材料在濕度感測上的應用
Novel TiO2-WO3 Composite Material for Application in Humidity Sensing
摘要
本研究是將不同比例的TiO2-WO3混合，以加熱攪拌，再經烘乾及400℃煅燒的程序後即可完成的感濕材料，再以X光繞射分析儀（XRD）、傅立葉紅外線光譜儀（FTIR）去分析複合材料的表面特徵。而我們也針對其感濕特性上，是利用阻抗分析儀（LCR）的量測分析，在不同相對濕度下的濕滯現象、反應時間（response time）和恢復時間（recovery time）來加以探討。結果顯示TiO2-WO3混合煅燒後所形成的複合材料是屬於單純的物理性混合並且是一個中孔洞性質的材料，而當TiO2-WO3（1：1）是有比較低的阻抗值，且阻抗值約從10^6 Ω下降至10^3 Ω有近3個數量級的變化，線性關係良好（R^2=0.9933），其中反應時間（response time）和恢復時間（recovery time）由相對濕度12～90% RH分別約為20、160秒；然而在不同相對濕度下的濕滯效應值皆低於0.7%，並且經由我們計算出的感測器靈敏度（S=451）比以往的研究相比高出許多。因此將TiO2-WO3混合作為複合材料的濕度感測器是具有潛力且值得我們去做進一步探討及研究。
並列摘要
A novel TiO2-WO3 composite material was prepared in a different proportion of TiO2 and WO3. The obtained mesoporous material was characterized by XRD (X-ray diffraction), FTIR (Fourier transform infrared). The humidity sensing properties were measured by using LCR (Inductance, capacitance and resistance) analyzer system. The results exhibited that the sample with TiO2-WO3 (1:1) showed better humidity sensing properties than others within the range of 12~90% relative humidity (RH), the response and recovery time were about 20s and 160s, respectively. Compared to the previous studies, the prepared sensor exhibits higher sensitivity (S=451) and the low hysteresis value was around 0.13% at 32% RH. while the impedance varying about three orders of magnitude. Our results demonstrated the potential application of TiO2-WO3 composite for fabricating high performance humidity sensors.