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高耐熱鋁導線合金設計及製程技術研究

The Research on Process and Alloy Design of Aluminum Bonding Wires with High Heat Resistance

摘要


鋁導線一般作為功率元件等大電流所用之配線材,近年來也多應用於航空、汽車及深井鑽探等產業應用,然面對功率要求越來越高,高接面溫度問題也逐漸浮出討論。由於寬能帶半導體碳化矽和氮化鎵可以在更高溫度下運行,目前正應用至功率半導體,如金屬氧化物半導體場效電晶體和絕緣柵雙極型電晶體等。隨著此類功率元件高密度化、小型化及高輸出功率化之趨勢,開發高耐熱鋁導線之需求也勢在必行。本文主要研究高耐熱鋁導線之材料配比設計,以及鋁合金熔鑄及擠型等製程技術。本研究開發之鋁鑄錠,以4N以上純鋁當作熔煉基材,搭配鈧(Sc),鋯(Zr),矽(Si)等金屬提升材料強度及耐熱性,Al-Sc-Zr-Si合金在適當調配下可以得到導電率IACS 60%以上,硬度在Hv50以上。材料固溶處理溫度約630~650℃,持溫3hr以上,時效處理在300~400℃之間,持溫3hr以上,可得到最高強度約140N/mm2,延伸率>15%。材料經擠型後作時效處理,時效溫度由250提升至400℃,抗拉強度也會隨之增加,且材料並無再結晶軟化現象;當時效溫度超過400℃,材料強度降低,產生再結晶軟化現象。

關鍵字

鋁導線 高耐熱 合金設計 製程

並列摘要


Aluminum bonding wires are usually used for heavy current, and are also used in aircraft and vehicles in recent years. For higher power, the high contact temperature have been discussed. SiC and GaN can work in higher temperature, so they could be used in semiconductor for power, for example MOSFET and IGBT. The power modules are with high density, smaller, and high output power, and the demand for aluminum bonding wires have to study. This research studies the alloy design of aluminum wire with high heat resistance, and the technologies in aluminum casting and extrusion. The ingot based on 4N aluminum material, and then doping Sc, Zr, and Si to improve the strength and heat resistance. Al-Sc-Zr-Si alloy can be obtained the conductivity more than 60% IACS, and the hardness more than Hv50. The solution treatment temperature is about 630~650℃, holding temperature more than 3hr, and the aging treatment temperature is between 300~400℃, holding temperature more than 3hr. Then the max. strength is about 140N/mm^2, and the elongation is more than 15%. The result shows that the tensile strength will increase when the aging temperature from 250 to 400℃ after extrusion, and there is no recrystallization and softening. The tensile strength is reduced when the aging temperature exceeds 400℃, resulting in the recrystallization softening.

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