- 期刊
整合型無線微懸臂樑式B型肝炎病毒DNA檢測系統晶片
An Integrated Microcantilever-based Wireless DNA Chip for Hepatitis B Virus (HBV) DNA Detection
摘要
利用0.35μm CMOS Bio-MEMS製程平台開發的完整積體化DNA感測系統晶片，共整合壓阻式微懸臂樑DNA感測元件、介面電路、MCU以及無線傳輸電路。由於此平台提供金屬沉積製程，因此，可透過表面固定化步驟使probe DNA於微懸臂樑表面形成共價鍵而固定於其上，使微懸臂樑功能化，可對特定DNA續列產生靈敏度，因DNA於微懸臂樑表面雜交會產生應力的變化，可透過多晶矽壓阻材料將訊號傳遞給後級電路處理分析。由實驗結果可知其具備極佳的選擇性並且DNA濃度動態量測範圍為1 pM至100 pM。
並列摘要
An integrated DNA detection system-on-chip (SoC), which includes microcantilever based DNA sensors, readout circuits, MCU, and RF OOK TX/RX, is implemented by a 0.35 μm CMOS Bio-MEMS process and post-processing steps. Utilizing the stress generated by DNA hybridizations, the integrated piezoresistor provides a resistance-variation signal. This signal represents the detection of a specific DNA sequence. It is digital processed and wireless transmitted by on-chip circuits. The experiment results reveal the developed DNA detection SoC has excellent selectivity and detection concentration range of the specific DNA from 1 pM to 100 pM.