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光電材料及元件製造業排放管道揮發性有機物排放特性之研究
VOCs Emissions Characteristics of Exhaust Gases from Stationary Sources of opto-electrical Industries
摘要
臭氧空氣污染問題，主要為揮發性有機物及氮氧化物二種前趨污染物所形成，其中許多種類的揮發性有機物更具有較高的臭氧生成潛勢，光電廠使用之VOCS具有高粘性之特性，量測時容易造成儀器管路內部黏著，致使檢測值偏低及堵塞管線等問題產生。本研究為釐清採樣管線加熱與否對測值之影響、不同採樣方法（NIEA A723.72B和NIEA A433.71C）之差異、每組採樣時間長短對RA計算結果之影響，共進行二次採樣分析。第一次採樣結果顯示VOC CEMS與標準檢測方法數據不相合；高濃度時，VOC CEMS數據明顯偏低，無法反應高濃度排放狀況。高濃度管道之A433.71C檢測數據於前一個小時出現明顯累積現象，研判此時採樣管路已發生阻塞導致。A723.72B檢測數據呈現平滑數據分布，此分布與RTO週期性瞬間排放特性不相合，研判此時採樣管路已發生阻塞導致。第二次採樣結果顯示不同檢測方法中A433.71C之測值震盪小而分散，A723.72B之測值震盪大而集中；A433.71C較能反應煙道即時排放狀況。管線是否加熱：兩檢測方法之管線加熱測值均較管線不加熱測值高（約50ppm）。不同管線材質於A723.72B標準方法且管線加熱狀態下，鐵氟龍管與不鏽鋼管測值與分布狀況接近；管線不加熱，鐵氟龍管之測值持續偏高且震盪較分散；不鏽鋼管之測值偏低且較集中。檢測公司A和B於A723.72B標準方法之檢測數據，經比對後兩者測值與分布狀況接近，顯示檢測公司之素質或儀器之影響不明顯。
並列摘要
The ozone is one of the major air pollution problem in Taiwan. The VOCs and NOX are the precursors of ozone formation. In Taiwan, the opto-electrical industry is a major business. The VOC emssions from opto-electrical industry is the third large emission inventories in total emission amount and the first large emission inventories in unit emission. Especially, some of VOCs emitted from the opto-electrical industry have high Maximum increment reactivity (MIR) of ozone formation. To improve the air quality, Taiwan Environmental Protection Administration have made some rule to require theowners or operators of stationary sources to reduce the VOC emssions and install continuous emission monitoring system (CEMS) for some significant emission inventories. Some VOCs used and emitted by the opto-electrical industry are high boiling point and highly viscose. They are easily stick on the sampling lines of CEMS and result in the inaccuracy measurment. Besides that, to meet the requirement of VOC emission standards, most of the owners or operators setup the regererative thermal oxidizers (RTO) to reduce the VOC emissions. The VOC emission profile for some type of RTOs have periodical high emission peak. There will be one significant problem from time-sharing CEMS to monitor the VOC emission from RTOs, it maybe could not get the complete VOC emission profile. To clarify the problems, this study is carried out to investigate the effect of the temprature of sampling lines, different reference methods (NIEA A723.72B and NIEA A433.71C) and the materials of sampling line on the VOC emission profiles. The results show that, the measured VOC concentration is different between the VOC CEMS setup by the owners or operators and the reference methods. For the case of high emission concentration, the VOC concentrations measured by CEMS are significantly lower than that of refence methods. The effect of sampling lines’ temperature on VOC concentrations is significant. The VOC concentrations measured by the reference methods with higher temperature of sampling lines are 50 ppm higher than that of lower temperature of sampling lines. In the case of higher temprature of sampling lines, the difference of VOC concentration measured is slightly between stainless steel (SS) tubings and Teflon tubings. However, in the case of lower temprature of sampling lines, the VOC concentration meseaured by using SS sampling tubings is lower than that of Teflon tubings.