摘要
The 34^(th) IEEE International Conference on Micro Electro-Mechanical Systems 2021 was held virtually by the IEEE MEMS Technical Community. This conference is one of the premier annual events reporting research results on all scientific aspects of Mi-cro/Nanoscale Devices, Micro/Nanosystems, as well as their relevant technologies and industrial trends. The conference consists of many keynote addresses and presentations from different experts in the field of sensors.