- 期刊
鋰磷氧氮化物(LiPON)固態電解質薄膜之製作及其特性分析
Fabrication and Characterization of Lithium Phosphorus Oxynitride (LiPON)
摘要
本研究乃探討不同濺鍍功率對於固態電解質薄膜之影響，並建立其最佳電化學特性。其中以粉末X光繞射儀(X-ray diffraction; XRD)鑑定樣品之晶相及其結晶度；以掃描式電子顯微鏡(scanningelectron microscope; SEM)觀測樣品表面形貌與其鍍率；並以X光電子能譜 (X-ray PhotoelectronSpectroscopy; XPS)量測樣品之配位環境；此外利用交流阻抗測試計算電解質之離子導電度。經上述鑑定發現於75 W與5 mtorr條件下製備之鋰磷氧氮化物(LiPON)薄膜具較高含量之三重鍵結氮，故其離子導電度可達1.38 × 10^(-6) S/cm。
並列摘要
The different sputtering power were revealed to discuss the effects on the solid electrolyte, and set up the best electrochemical performance of it. The crystal structure and crystallization were characterized by X-ray diffraction (XRD). The morphology and deposition rate were analyzed by scanning electron microscope (SEM). X-ray photoelectron spectroscopy (XPS) were used to observe the coordination conditions. The ion conductivity of solid electrolyte was calculated by performing the electrochemical impedance spectroscopy (EIS). Under these characterizations could discover that there was more triply coordinated nitrogen in the LiPON thin film under the 75 W and 5 mtorr fabricating factors. Its ionic conductivity could reach 1.38 × 10^(-6) S/cm.