複合薄膜製程及多層膜特性分析技術

Characteristic Analysis Technology for Multilayer Thin Films

林士欽 ； 賴識翔 ； 梁沐旺 ； 王慶鈞 ； 唐謙仁 ； 田春林

《機械工業雜誌》 447期 (2020/06) Pp. 15-22

摘要

傳統的光學濾光片使用高低折射率膜堆設計，需要有初始設計才有辦法得到與目標光譜相近之結果，新的光學薄膜濾光片製鍍方式可採用混合薄膜技術，除了具有能夠改善單一材料的物理及化學特性外，亦能使用折射率漸變光學濾光片為正弦函數分佈的混合膜設計方法取代傳統以高折射率及低折射率材料所構成之多層膜堆的光學濾光片設計。本文探討複合薄膜製程中之高品質薄膜特性問題，輔以濺鍍薄膜的技術及特性量測實驗，尋找出最佳的製程參數，使單層高、低折射率薄膜為設計基礎之多層膜光學效能提升、殘留應力有效降低，進而探討多層膜疊加後的光學效能、表面與應力行為，期使對薄膜製程及應用具有實際的功效助益。

關鍵字

多層薄膜 ； 薄膜應力 ； 模擬

並列摘要

Traditional optical filter uses high and low refractive index films with stacked design that requires initial design to get results similar to target spectrum. However, new optical film filter coating method can use composite film technology. In addition to the physical and chemical properties, this new method can improve quaity down to single material, because it can use the refractive index gradient optical filter for sine function distribution in hybrid film design method to replace the traditional multi-layer optical coating design. In this paper, the characteristics of high quality thin films in the process of composite thin films are discussed and the optimum process parameters are found. The single layer high and low refractive index films are designed to improve the optical efficiency and residual stress. Furthermore, coating simulation is used to state the phenomenon of molecular transmission. The model provides computer aided design tool that can benefit thin film manufacturing processes and applications.

並列關鍵字

Multilayer thin films ； Stress ； Simulation

參考文獻

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