極精密雷射振鏡馬達運動控制系統設計

High-Precision Motion Control System Design of Laser Galvano Motor

林奕任 ； 楊士進 ； 周柏寰

《機械工業雜誌》 460期 (2021/07) Pp. 70-82

摘要

本文針對雷射振鏡馬達驅動系統提出極精密速度與加速度雙估測回授運動控制設計，旨在提升印刷電路板製造精度與擾動抑制性能。該設計以永磁電機搭配高解析脈衝插值正餘弦編碼器為基礎，提出一種僅透過位置回授的速度與加速度雙估測器。第一個速度估測器設計可提升系統穩定性並消除差分雜訊。此外，因加速度與負載力矩成正比，藉由第二個加速度估測器設計進行加速度回授控制，可改善反射鏡片在高速偏擺下不平衡的力矩擾動問題。最後，本文將整合雙估測器與運動控制器於振鏡馬達驅動系統中進行性能實測，期望能改善雷射加工精度。

關鍵字

振鏡掃描系統 ； 位置控制 ； 加速度估測

並列摘要

To improve the printed circuit board (PCB) manufacturing accuracy and the disturbance rejection performance, this paper proposes a high-precision motion control for the Galvano motor system through the dual observer for speed and acceleration estimation. The Galvano motor is implemented by a permanent magnet (PM) motor with a sine/cosine encoder for the feedback control. The position sensing resolution is increased based on the interpolation of every two encoder counts. After that, a dual-observer is proposed respectively for the speed and acceleration estimation using only the position measurement signal. The first speed observer is designed to remove the differentiate noises and improve the system stability. In addition, since the acceleration is proportional to the motor load torque, the second acceleration observer is developed for the acceleration feedback control to improve the disturbance load torque, caused by the unbalanced rotation of the laser mirror. The proposed dual-observer estimation and motion control are implemented in a Galvano motor system for the experimental validation.

並列關鍵字

Galvano scanner system ； Position control ； Acceleration estimation

參考文獻

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