- 期刊
晶圓機器人的市佔統計與發展趨勢
Market Share Statistics and Development Trends of Wafer Robots
摘要
半導體生產線上，使用電腦控制的自動化已盛行多年。特別是在矽晶圓上做出半導體的前段製程中的自動搬送機與機器人，在製程的串接上發揮了很大的功用。從晶圓倉庫到生產線的搬運、將半成品晶圓從無塵室內的某一製程搬送到另一個製程、或是同樣一個製程內對某一裝置的裝卸載等，甚至是將完成的晶圓搬送到下一個晶圓檢驗製程的搬送作業，均由自動搬送機或機器人，以幾乎完全自動化的方式達成，在半導體製程設備中所使用的晶圓機器人（Wafer Robot），於晶圓片的移載及傳送，具有相當的重要性，機器人在半導體設備裡是個「重要的配角」。在上述的認知和半導體設備的市場規模研究基礎下，我們以實際訪廠、問卷，以及統計手法得到2017年～2021年臺灣半導體廠前後段製程設備所導入的機器人品牌與數量。除了列出市佔排名外，並提出二個觀點，一是半導體製程設備商為了讓自己的產品更有競爭力，會朝向提供更Total Solutions（整合功能）的解決方案給半導體製造商。二是做晶圓機器人的公司將不只是提供機器人，而是提供成機，也就是EFEM（Equipment Front End Module，設備前端模組）、Sorter（分揀機）一起做，亦即不只單賣機器人，而是將機器人搭配Sorter、EFEM、Aligner（對準器）一起出貨給半導體設備商。
並列摘要
In the semiconductor production lines, the use of computer-controlled automation has prevailed for many years. In particular, the automatic conveyors and robots in the process of making most semiconductors on silicon wafers have played a great role in the serial connection of the process. Transport from wafer warehouse to production line, transportation of semi-finished wafers from one process in a clean room to another process, or loading and unloading of a device in the same process, etc., and even transportation of completed wafers. The transfer operation to the next wafer inspection process is completely automated by automatic transfer machines or robots. The wafer robot is used in the semiconductor process equipment for the transfer of wafers. Wafer robots are an ＂important supporting role＂ in semiconductor equipment. On the basis of the above-mentioned cognition and market scale research of semiconductor equipment, we obtained the brand and quantity of robots imported by the front and rear process equipment of Taiwan semiconductor factory from 2017 to 2021 through actual factory visits, questionnaires, and statistical methods. In addition to listing the market share rankings, we present two viewpoints. First, in order to make their products more competitive, semiconductor process equipment manufacturers will provide more Total Solutions to semiconductor manufacturers. Second, companies that make wafer robots will not only provide robots, but complete machines, that is, EFEM (Equipment Front End Module), Sorter together, not only selling robots, instead, the robot is shipped with Sorter, EFEM, and Aligner to semiconductor equipment manufacturers.