半導體產業機器人應用現況與發展

當今半導體產業專用機器人，需符合半導體製程要求潔淨度、防塵、重複精度高、耐震度高之特性，晶圓機器人（Wafer Robot）多半搭配週邊設備採購，節省設備整合與測試時間，加快產線升級或擴廠產線；業者與應用商已合作多年，具有一定默契與經驗，已習慣了日系品牌手臂與半導體設備，選用上趨於保守。在臺灣半導體產業後段製程，多以Overhead Hoist Transfer（OHT）進行晶圓搬送，但需空間架設軌道，較應用於標準化製程；近年來，場域中開始講求彈性、靈活性，除了有半導體專用機器人，也開始引進自主移動機器人與協作機器人的半導體廠解決方案，提升半導體產線設備升級。

關鍵字

晶圓機器人；自主移動機器人；協作機器人

並列摘要

Robots for today's semiconductor industry need to meet the characteristics of cleanliness, dust prevention, high repeatability, and high shock resistance required by the semiconductor process. Most of the wafer robots are purchased with peripheral equipment to save equipment integration and testing time, and speeding up production line upgrades, or expansion of production lines. The industry and the applicator have been cooperating for many years, and they have a certain understanding and experience, and they are used to Japanese brand arms and semiconductor equipment, and tend to be conservative in selection. In the back-end process of Taiwan's semiconductor industry, Overhead Hoist Transfer (OHT) is mostly used for wafer transfer, but it requires more space to set up tracks, and it is more used in standardized processes. In recent years, flexibility has begun to be emphasized in the process. In addition to semiconductor-specific robots, it has also begun to introduce autonomous mobile robots and collaborative robots for semiconductor factory solutions to upgrade semiconductor production line equipment.