全球半導體設備關鍵模組產業趨勢

半導體設備關鍵模組包括真空模組、光學模組、電源與反應氣體模組、流體模組、晶圓和光罩傳送模組、熱處理模組等。2022年全球關鍵模組的總銷售額約229億美元，成長率為15.2%，與半導體設備市場的發展趨勢緊密相關。半導體設備關鍵模組的發展逐漸受到國內業者重視，本文分析半導體設備中的關鍵模組種類、次品項、銷售額、主要廠商，以及說明未來關鍵模組的產業趨勢，希望可以提供給我國產研單位，更明確的研究發展方向。

關鍵字

電子設備產業；半導體產業；半導體設備關鍵模組

並列摘要

Semiconductor equipment includes vacuum modules, optical modules, electrical and reactive gas modules, fluid modules, wafer and mask transfer modules, heat treatment modules group etc. In 2022, the total sales of global key modules will be approximately US$22.9 billion, with a growth rate of 15.2%, which is closely related to the development trend of the semiconductor equipment market. The development of key modules of semiconductor equipment has gradually been valued by Taiwan players. This article analyzes the types of key modules, detailed items, sales, and major manufacturers in semiconductor equipment industry, and explains the industry trends of key modules in the future. It is hoped that it can be provided to Taiwanese research and industry with a clearer development direction.