並列摘要
In the advanced manufacturing process of optoelectronic semiconductors, in order to prevent line breakage or interlayer adhesion caused by dust particles in the air, particle counters are often used to monitor and warn changes in the number of ambient air particles. Particle counters are generally mobile or hand-held. In the past, this equipment was used to conduct regular and fixed-point sampling tests on key areas. With the development of Industry 4.0, the particle counter must be able to meet the needs of a large number of distribution points on the production line for 24-hour monitoring, and even be installed in the machine for measurement. Based on the needs of the industry, the Industrial Technology Research Institute, Center for Measurement Standards develops remote air particle counter products with long-term / miniature / Internet of things designs.