超快雷射表面選擇性加工製程技術探討

立陶宛產高功率飛秒雷射源（Femtosecond Laser），因為穩定性高、速度快，在全球工業應用上具有舉足輕重的地位。在經濟部協助下，工研院攜手立陶宛雷射產業於工研院南分院成立「超快雷射研發創新中心」，引進立國飛秒雷射源、關鍵光學零組件及設備／製程控制技術。在超快雷射源中，飛秒雷射的因脈衝更短（～10^(-15)秒）、峰值能量更高與極低熱影響區之加工特性，在精準醫療模具製程、半導體晶圓製程、5G精微電路及電子元件製程等超精密加工應用的相關產業上具有極大的優勢。本文將介紹以立陶宛飛秒雷射源搭配工研院光學光路設計達成的材料表面選擇性加工製程技術，其主要可應用於模具微深刻技術、雷射誘發週期性微結構生成技術與軟性印刷電路板銅箔雷射成型技術。

關鍵字

超快雷射；飛秒；精密加工

並列摘要

Due to high stability and fast speed, Lithuania's high-power femtosecond laser sources play a pivotal role in the global industry application. With the assistance of The Ministry of Economic Affairs, the Industrial Technology Research Institute (ITRI) joined hands with Lithuania's laser industry to establish the "Ultrafast Laser Technology Research & Innovation Center" at the ITRI Southern Region Campus, and introduced Lithuania's femtosecond laser source, optical key components, and the laser machine/process control technology. Among ultrafast laser sources, femtosecond lasers have shorter pulse width (~10^(-15) seconds), faster speeds, and higher energy accuracy, making them very suitable for applications in precision medicine and ultra-precision processing. This article introduces the surface selective processing technology achieved by femtosecond laser source and digital light path, which is applied to mold micro-engraving technology, color engraving technology by using Laser-Induced Periodic Surface Structures (LIPSS) processing, and laser forming copper foil technology for flexible printed circuit board.

並列關鍵字

Ultrafast laser ； Femtosecond ； Precision processing

參考文獻

M. Lenzner, et al., “Precision laser ablation of dielectrics in the 10-fs regime,” Applied Physics A Materials Science & Processing, 68(3), 369-371, 1999.