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中小型無塵室設計FFU尺寸與運轉管理討論

摘要


如何以最優化的初設成本去建造一間可以降低耗能或其他運轉費用之潔淨室是現今潔淨室設計建造的最大挑戰。本文討論潔淨室潔淨FFU設計之相關設計條件,並針對中小型無塵室FFU尺寸之規格選定,探討其優化選擇以兼顧FFU系統之初設成本及運節能減碳能比較說明。

並列摘要


It is a critical task for the cleanroom designer to build up a cleanroom at optimized cost while achieving the lower operation cost under the same cleanroom cleanliness. This article discuss relationship between key design parameters of FFU selection, especially the size of FFU affecting the initial cost and operational cost, via simulation of a cleanroom casestudy.

參考文獻


Institute of Environmental Sciences Contamination Control Division Recommended Practice IES-RP-006.2 “Testing Cleanrooms
International Organization for Standardization ISO 14644-1 Cleanrooms and associated controlled environments - Part 1: Classification of airborne particulates
胡石政、陳明坤,半導體潔淨室節約能源之可行方法。中國冷凍空調雜誌,第 35 期,P88-93,1997。
RajanJaisinghani , Energy Efficient Low Operating Cost Cleanroom Airflow Design。ESTECH 2003。
黃佳松,半導體廠潔淨室氣流模擬分析與省能運轉策略。國立台北科技大學冷凍空調工程系碩士論文,2005。

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