Homo-Multilayer ITO Films on PET Substrates using Continuous Roll-to-Roll Sputtering Processing

同型多層ITO薄膜在PET基材上採用連續捲軸濺射式製程技術

Chih-Lung Tseng(曾志隆) ； Ya-Wen Lin(林雅雯) ； Po-Jui Chiang(江柏叡) ； Jau-Ji Jou(周肇基)

《中正嶺學報》 45卷2期 (2016/11) Pp. 23-27

摘要

The homo-multilayer indium tin oxide (ITO) films have been deposited onto polyethylene terephthalate (PET) substrates by continuous roll-to-roll sputtering at room temperature. While piling up to homo-5-layer ITO film, the best transmittance of 90.12% in visible wavelength and piling up to homo-10-layer ITO film, the sheet resistance of 68Ω/□ are obtained. The TEM diffraction images of ITO films show crystalline at the optimal 5-layer structure, and the nano-sized grains (~50 nm) distributed uniformly all over the surface from TEM investigation. The 5-layer ITO film average roughness is 1.551 nm from AFM investigation.

關鍵字

ITO films ； homo-multilayer ； PET substrates ； roll-to-roll sputtering

並列摘要

我們用連續捲軸室溫濺射式製程技術實現同型多層ITO薄膜沉積在PET基材上。當堆放至homo-5-layer ITO薄膜，我們可以得到最好的可見光90.12%透光率；堆放至homo-10-layer ITO薄膜，可以得到最低的68Ω／□薄層電阻。我們從TEM研究ITO薄膜的TEM衍射圖像，可看出最優的5層結構晶體和奈米級顆粒結晶（～50奈米）均勻地分佈在整個表面，我們亦從AFM可以得到5層ITO薄膜平均粗糙度為1.551奈米。

並列關鍵字

ITO薄膜 ； 同型多層 ； PET基材 ； 捲軸濺射