Development on Micrometer Scales Piezoresistive Sensors

微米級壓電阻應力計之開發

Chia-Fa Chu(朱嘉發) ； Kun-Fu Tseng(曾崑福) ； Ben-Je Lwo(羅本喆)

《中正嶺學報》 44卷1期 (2015/05) Pp. 69-74

摘要

Because of the relative large in size, stress measurements on advanced microelectronic packaging through the traditional piezoresistive sensor is not appropriate. Consequently, size-reduced piezoresistive sensors up to 5 μm edge length with a supplementary circuit design is proposed, and parameter extractions were performed through suitable methodologies in this paper. According to the experimental data, it is concluded that a single pair of piezoresistive coefficients can be employed for different size-reduced sensor designs.

關鍵字

Electronic Packaging ； Piezoresistive Stress Sensor ； Piezoresistive Coefficients

並列摘要

由於傳統歷電阻應力計之尺寸過大，使其已漸不適用於先進微電子構裝之應力量測。基於此，本研究提出將傳統壓電阻應力計予以微型化之各種尺寸設計，其最小者邊長為5微米，同時開發出與其配套之電路佈局設計及參數萃取方法。從分析實驗數據後發現雖然各種縮小之微應力計之尺寸並不相同，但其壓電參數卻都是一致的。

並列關鍵字

電子構裝 ； 壓電阻應力計 ； 壓電參數