- 學位論文
微型三次元量測儀精度提升之研究
Research on the Accuracy Improvement of Micro Coordinate Measuring Machine
摘要
本論文為進行微型三次元量測儀精度提升之研究，其中包含將量測儀組裝時的各項誤差補償以及多自由度量測系統(MDFMS)的波長模組組裝校正。補償的誤差有垂直度誤差、平坦度誤差與角度所造成的阿貝誤差。 文中將介紹微型三次元量測儀之各硬體部分，包括共平面平台、Z軸、探頭、波長補償模組及感測器，感測器包含作為位置回授的線性繞射光柵干涉儀 (LDGI)以及多自由度量測系統(MDFMS)。 本研究中利用穿透式光柵與自動視準儀結合成波長補償模組，並以市售SIOS雷射干涉儀比對校正出感測器之絕對波長，提高平台定位的準確度。此外，利用具有規範五角稜鏡、光學平板校正出量測儀之垂直度與平坦度誤差；加上一套定義阿貝臂距離的流程，以確實的將阿貝誤差補償消除。最後結合掃描接觸式探頭進行實際量測平坦度與掃描應用。
並列摘要
This research focuses on the improve the accuracy of Micro Coordinate Measuring Machine(Micro-CMM). Which contains the error compensation in assembling Micro-CMM and calibration of wavelength compensator. Error compensation Including the perpendicularity, flatness and Abbe error caused by the pitch angle. Each unit of Micro-CMM would be introduced in the paper, including Co-planar stage, Z axis, probe and all the sensors, which include laser diffraction grating interferometer (LDGI) and Multi-degree-of-freedom Measurement System (MDFMS) as position feedback. In this research, wavelength compensator is combining by transmission grating and autocollimator. In order to improving the accuracy of Co-planar stage, a Laser interferometer is also used to calibration the actual wavelength of wavelength compensator. In addition, the use of high precision penta prism, optical flat measuring perpendicularity and flatness error of Micro-CMM. By defining the Abbe arm can accurately eliminate the Abbe error. Finally, combining the probe system and CMM to measuring flatness and scanning applications.