高準確性微壓力感測器之研究

本論文主要之目的在於研究加上不同的加強材結構於壓力感應薄板後對微壓力感測器的影響，其中包括了不同結構在變位、應力與應變方面的變化，以及各種不同結構在相同靈敏度下之壓力變化。傳統沒有加上加強材的微壓力感測器其所能量測的壓力範圍較小，本文設計在傳統的壓力感應薄板上加上圓形加強材、圓環加強材以及方形加強材，針對具加強材與不具加強材的感應薄板作分析，並且，模擬出具加強材與不具加強材的感應薄板其變位、應力與應變的結果，並將結果進一步與解析解作比較，計算其誤差。最後，利用所得的結果實際設計出各種微壓力感測器在相同的靈敏度之下，比較各種不同的微壓力感測器其在線性範圍內所能承受的最大壓力，以便於得到微壓力感測器的最佳設計。

關鍵字

感測器；微機電；加強材；壓力

並列摘要

Pressure sensors with different kinds of center boss applied to decrease the nonlinearity of the structure and increase the accuracy of pressure measurement is in investigated. In this paper, exact solutions of circular diaphragm with stiffened ring are derived. Moreover, numerical results of rectangular diaphragm with stiffened boss is calculated by ANSYS software. Finally, some design cases are studied to compare the performance difference between traditional pressure sensors and this present ones.

並列關鍵字

boss ； sensors ； pressure ； rigid center boss

參考文獻

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6. D. Skurnik, “An Integrated Circuit Capacitive Pressure Transducer”, Master’s thesis, Department of Electrical Engineering and Applied Physics, Case Western Reserve University, Jan 1980

國際替代計量

高準確性微壓力感測器之研究

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