- 學位論文
像散式多軸位移量測系統之設計與開發
Design and Development of a Multiaxial Astigmatic Displacement Measuring System
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摘要
本論文設計與建構一新型非接觸像散式多軸位移量測系統，以像散原理量測待測物表面之高度、角度及其變化。本像散式多軸位移量測系統直接應用市售DVD光碟機之讀取頭作為量測光路，可同時精密地量測物體表面之線性與角度位移變化，其線性位移量測範圍可達6 um，最大運作頻寬為80 Mhz，最高解析度可達次原子級。當操作頻率700 kHz時，其線性位移及角度位移訊號之雜訊準位分別小於0.8 pm/Hz1/2與0.4 urad/Hz1/2。 像散式多軸位移量測系統可偵測原子力顯微術中探針懸臂樑之線性與兩軸角度位移變化，以接觸、輕敲與非接觸等三種模式皆可解析出單層石墨原子台階，證明量測系統之解析度確實可達到次原子級，除此之外量測系統亦可動態量測探針懸臂樑之熱擾動。此外，掃描探針顯微術的準確性不止取決於量測系統本身，更依賴其所使用探針之物理與幾何特性。 本量測系統有十分緊緻之結構造型，除了透過探針量測，亦可直接以光學非接觸模式進行量測，是相當具有應用彈性的高精密多軸位移量測系統。以光學輪廓儀模式操作下，成功地完成CD光碟片表面與CCD微透鏡組之量測。最高水平掃描速度估計可達3.84×106 um/s，是市售掃描探針顯微鏡的一百萬倍。 本量測系統還具備有極佳的未來發展性，量測系統的擴展性和精確性可以不斷地追隨著讀取頭的性能演化。從目前的DVD讀取頭到未來更高解析度的藍光（Blu-ray）或次世代DVD（HD-DVD）讀取頭都可以整合到本量測系統中。
並列摘要
In this dissertation, a novel non-contact multiaxial astigmatic displacement measuring system (MADMS) is designed and developed using the astigmatism as the measuring principle for the translational displacement, the angle, and their variations of a measured surface simultaneously. The pickup head of a commercial digital versatile disk (DVD) read only memory (ROM) drive can be used directly as an optical path mechanism in the above mentioned MADMS, which can measure the translational and angular displacements accurately and simultaneously. The total linear detection range and the maximum measurement bandwidth of the MADMS are 6 um and 80MHz, respectively. The resolution of the translational displacement measurement is in sub-angstrom scale. For an operating frequency of 700 kHz, the noise floors of the translational and angular signals are below 0.8 pm/Hz1/2 and 0.4urad/ Hz1/2, respectively. The MADMS can monitor the translational and two orthogonal angular displacements of a micro fabricated cantilever in atomic force microscopy (AFM). All the three, contact non-contact and tapping, modes can resolve the single atomic steps of the graphite surface, which indicates that atomic resolution is achievable with the MADMS. The thermal noise spectra of the AFM probe can be clearly measured as well. Furthermore, the accuracy of scanning probe microscopy (SPM) depends not only on the measurement system itself, but also by the accuracy of the signal processing, which further depends on the physical and geometrical characteristics of the probe. The structure of the MADMS is compact and stable. Besides the measurements through AFM probes, the MADMS can be operated in profilometer mode. The CD surface and the CCD microlens are measured by this mode. The maximum scanning speed can reach up to 3.84×106 um/s theoretically, almost one million times faster than that of a commercial SPM system. The MADMS has great potential for future development, the expansibility and the accuracy can evolve with the performance of future pickup head. From the DVD pickup head to higher resolution one, such as the pickup head of the Blu-ray drive or high- definition (HD-DVD), can be integrated into the MADMS as well.
並列關鍵字
Astigmatism ； MADMS ； Translational displacement ； Angular displacement ； SPM ； AFM ； Cantilever ； Optical profilometer參考文獻
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