- 學位論文
具自動對焦及傾斜校正之雙光子聚合微製造系統
Micro Manufacturing System for Two-Photon Polymerization with Automatic Focus and Tilt Correction
摘要
本文提出雙光子聚合之自動化微製造系統，此系統開發於倒置式光學顯微鏡上，可用於製造最大尺寸200微米之微產品。首先藉由偵測雷射聚焦點的影像強度，發展出自動對焦程式以得到在玻片表面的雷射對焦點位置；自動對焦是透過分析不同高度的影像像素強度值而求得最大強度之對焦高度。玻片的傾斜角是藉由自動對焦程式找出玻片表面不同三點之相對高度來定義，並根據此三點之高度發展傾斜校正程式，用於補償玻片傾斜。微製造系統另整合了實體模型切層、雷射路徑規劃、機台路徑控制及雷射強度控制等程式以進行微產品之製造。為了測試自動對焦程式的成果，在採用和不採用自動對焦和傾斜校正的情況下，分別製作微透鏡陣列、微菲涅爾透鏡及微光柵等產品，其結果顯示採用自動對焦和傾斜校正的產品其品質較佳。另外也成功製造微彈簧、微碳分子結構模型等微產品，以顯示本論文發展之系統可以有效地製造任意二維及三維之微產品。
並列摘要
This thesis proposes a micro manufacturing system for Two-Photon Polymerization (TPP) with automatic focus and tilt correction. The system is developed on an inverted optical microscope and can be used for manufacturing micro products with maximum size of 200 micrometer. First, an autofocus program by sensing the image intensity of laser focal point is implemented for locating the position of laser focal point on the substrate surface. Autofocusing is achieved by analyzing the pixel intensity values of each image with different z position to find the most intense intensity as the laser focus position. With finding the relative heights of three different points on the substrate surface by the autofocus program, the inclined angles of the substrate surface plane can be identified. Based on the heights of the three points, a tilt correction program is also developed for compensating the inclined substrate. The micro manufacturing system also integrates programs for solid model slicing, path planning, stage motion control and laser intensity control for micro product manufacturing. Micro lens arrays, micro Fresnel zone plates and micro gratings fabricated with and without autofocus and tilt correction are presented to show the performance of autofocus program. With autofocus and tilt correction, the qualities are better. Some other micro products, such as micro springs, micro carbon molecular structures are also successfully manufactured. It shows that the system developed in this thesis can efficiently manufacture any 2D or 3D micro products.