- 學位論文
大氣低溫電漿表面改質技術應用COG接合之研究
Surface Modification of chip on glass by atmospheric pressure plasma jet
摘要
本研究是利用大氣低溫電漿，分別使用Air、O2、N2、Ar和He不同的電漿氣體，進行COG(Chip On Glass)接合前的ITO玻璃材料表面前處理，在進行COG接合前，對於電漿處理過後的材料進行潤濕性、粗糙度、表面形態分析；另外對於ITO 玻璃材料特性進行薄膜電阻和透光性分析，以確認電漿對於ITO玻璃表面之影響，最後對接合後的材料進行壽命測試及剪切強度試驗以探討其技術之可行性。研究結果顯示Air、O2、N2、Ar和He這一些不同的電漿氣體所解離出來的電漿均能有效的提高材料表面能量，增加潤濕性，對於ITO 玻璃的導電性及透光性處理前後並無明顯的變化。受到電漿處理過的材料表面經離子轟擊後有奈米級的粗化，藉此增加接合的接觸面積，最後ITO 玻璃進行COG接合後，進行高溫高溼85℃/85%RH的壽命以及剪力特性測試，結果顯示在Air、O2、N2、Ar和He不同的電漿氣體在經過1000hr老化試驗後，剪切強度可到達40kgf以上。
並列摘要
In this study, the pre-treatment on the ITO Glass for COG was investigated by atmospheric pressure cold plasma jet consisting of Air, O2, N2, Ar and He, respectively. The wettability、roughness and morphology of the ITO Glass treated by plasma before COG bonding. The effect of the plasma on the resistance and transmittance of the thin films for the ITO Glass was interesting to discuss. Finally, the life test and shear strength of the bonded COG were tested for the feasibility. The results show the different plasma gases ionized from Air, O2, N2, Ar and He enhance the surface energy and wettability of the ITO Glass effectively. There is no effect on the conductivity and transmittance of the ITO Glass which treatment. The surface of the ITO Glass treated with plasma ionizing is nano-scale coarsen which is to expand the contact surfaces. After bonding ITO Glass by COG, the life test and shear property under 85℃/85% RH atmosphere. The results reveal that shear strength could be higher than 40kgf tested under Air、O2、N2、Ar and He plasma with 1000hr aging test.