使用寬頻光源與即時補償法之真直度干涉儀

Straightness interferometer using broadband light source and real-time compensation method

黃懋憲(Mau-Shian Huang)

指導教授 ： 林世聰

國立臺北科技大學/電資學院/光電工程系研究所/碩士(2011年)

https://doi.org/10.6841/NTUT.2011.00647

摘要

本論文提出一套使用寬頻光源及即時補償的真直度干涉儀。其中，當干涉儀中的伍拉斯頓(Wollaston)晶體產生一橫向位移，干涉模態(它被一包絡函數調制)就產生一平移。而即時補償法反推伍拉斯頓晶體，直到干涉模態回到原位；透過此反推量，即時補償法可求伍拉斯頓晶體的橫向位移。我們實際組裝了該干涉儀，它的解析度及靈敏度分別為0.4nm及36.6o/μm；接著拿它進行量測實驗，實驗結果說明此干涉儀有0.08μm的穩定度、驗證此干涉儀的正確性與可應用於位移真直度量測、也說明此干涉儀俱有可延伸工作距離的優點。

關鍵字

伍拉斯頓晶體 ； 即時補償法 ； 真直度干涉儀 ； 位移真直度量測

並列摘要

A straightness interferometer utilizing a broad-band light source and real-time compensation method is introduced in this thesis. Where the interference pattern which is modulated by an envelope function undergoes a shifting as the Wolaston prism of the interferometer experiences a lateral displacement, the compensation method senses the displacement by driving the prism back to the place of restoring the pattern. A setup, which is with a measurement resolution and sensitivity of 0.4nm and 36.6o/μm, respectively, for realizing the interferometer is constructed and demonstrated. The experimental results from the uses of the setup reveal a measurement stability of 0.08μm, validate the interferometer, and confirm the interferometer’s applicability of straightness measurements and advantage of extensible working distance.

並列關鍵字

Wollaston prism ； real-time compensation method ； straightness interferometer ； displacement straightness measurement

參考文獻

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