利用CMOS-MEMS微型線圈實現新型具無線傳輸能力之電感式觸覺感測器

Design and Implementation of a Novel CMOS-MEMS Inductive-type Tactile Sensor with Wireless Sensing Potential

葉勝凱(Sheng-Kai Yeh)

指導教授 ： 方維倫

國立清華大學/工學院/動力機械工程學系/碩士(2017年)

摘要

本研究將微型線圈應用於觸覺感測器上，主要感測外界施力大小的為微型感測線圈，當外界負載不同時，由於微型線圈與金屬施力介面間產生距離的變化，再利用平面線圈(Planar coil)產生的電感變化以解析外界施力大小。本研究使用CMOS-MEMS 1P6M標準製程平台實現元件，並利用CMOS-MEMS極佳的電性繞線能力使線圈在相同面積下繞線更具優勢，再藉由金屬濕蝕刻定義凹槽以及高分子的填入產生高分子變形膜層，初步透過有限單元法(FEM, Finite Element Model)分析驗證訊號變化量，製作完成後再量測此元件在觸覺感測應用上之性能以及無線傳輸能力。元件在使用導磁金屬探頭驗證可行性後，使用高分子簡易封裝技術封裝導磁鋼球受力結構於其上，並且利用不同的量測規劃比較元件在不同量測環境、情況下的性能表現，最後決定觸覺感測器之規格、特性。

關鍵字

CMOS-MEMS ； 微型平面線圈 ； 電感式觸覺感測器 ； 高分子填充技術 ； 高分子變形膜層

並列摘要

This study presents a novel inductive-type tactile sensor with deformable polymer layer. The sensing principle of the structure is mainly dominated by the distance between sensing coil and metal contact interface. After applying the load on the metal contact interface, the polymer filler above the sensing coil would deform which decrease the distance between sensing coil and metal contact interface. Hence, the inductance of the planar coil would change due to the change of magnetic flux. CMOS-MEMS 1P6M standard process is utilized because of its great electrical routing ability, therefore, we can have high compact coil at specific area. By designing the sensing coil, controlling the thickness and varying the mechanical property of polymer, different sensitivity and sensing range of the tactile sensor can be derived. The preliminary simulation result shows the feasibility of such idea. The measurements of the sensor are carried out after fabrication to verify the sensing mechanism, and the wireless sensing capability is also demonstrated. Furthermore, the performance of the device integrated with the chrome steel ball is implemented. After the characterization of the basic performance of the inductive tactile sensor, the other testing conditions are fully discussed in the thesis. Finally, the specification of the device is presented.

並列關鍵字

CMOS-MEMS ； Inductive-type tactile sensor ； Micro planar coil ； Deformable polymer layer ； Polymer filler

參考文獻

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