光電式透明電路檢測技術

AN ELECTRO-OPTICAL INSPECTION TECHNOLOGY FOR TRANSPARENT CIRCUITS

詹智翔

指導教授 ： 林士傑

國立清華大學/工學院/動力機械工程學系/博士(2013年)

https://doi.org/10.6843/NTHU.2013.00016

摘要

於現今的科技產業中，透明導電物製備開發形成透明電路之用途，已廣泛地應用在觸控面板、顯示器，太陽能電池等多種的產品。然而在製備透明電路圖樣的過程中，有可能因蝕刻不完全殘留導電物而發生電路圖樣出現斷、短路等缺陷而造成功能不全。
面對檢測透明電路圖樣上的電性瑕疵，因其高透明度的特徵並不易從光學上的形貌去判斷透明電路的電性功能，若透過電性檢測的方式，則常是根據回饋的訊號作為電性上的判斷依據。是以本研究由形貌、電性二者特徵導向研發電性敏感物質之感測元件。
為了對具有高透明度與良好導電特性的透明電路進行檢測，在本研究中，前後使用兩種電場敏感物質─磷酸二氘鉀、高分子分散液晶作為感測元件，透過施加外部電壓建構一感應電場之下，此時人員或電腦可藉由觀察感測元件的狀態，得以分辨透明電路圖樣上的導電區域與不導電區域並可確認具電性區域的良善。經由可行性的初步試驗後，並對透明電路圖樣包括導電區和蝕刻不導電區的線寬，進行一系列的靈敏度模擬以及實驗驗證。期望可透過檢測透明電路的瑕疵、缺陷以發現製程或設備上的問題，進而有助益於提升良率。

關鍵字

透明導電物 ； 磷酸二氘鉀 ； 高分子分散液晶 ； 透明電路

並列摘要

Transparent conductive oxide (TCO) film is commonly adopted as transparent circuit, which is widely used in touch panels, displays, solar cells, etc. However, un-etched TCO remnants are frequently found in the manufacture process. These remnants and other defects may affect the function of the circuits.
Owing to the relation between the optical profile and the conductivity of remnant of the transparent circuits is not strongly correlated, while most optical methods were more focused on depicting the structure or morphology of the objective and then could only detect defective circuits indirectly. Even on the ways of electrical testing such as probe or tip depend on the response of electrical signal will need or waste a lot of time.
It is desired to design the set-up such that the instrument is capable of picking up signals that can differentiate the conducting area from non-conducting area for the transparent circuit. Both KD2PO4 and PDLC were used as the electro-optical sensing device in the study. Preliminary test was revealed the feasibility of the approach at first. And a series of simulation and experimental results were conducted to study effects of system parameters and evaluate the performance on the limitation of the inspection system for the transparent circuit. Developed system may be effect and helpful to match the original design and locate faulty shut/open circuits.

並列關鍵字

Transparent Conductive Oxide (TCO) ； Deuterated Potassium Dihydrogen Phosphate (KD2PO4) ； Polymer Dispersed Liquid Crystal (PDLC) ； Transparent Circuit

參考文獻

[1] T. Minami et al., “Substitution of Transparent Conducting Oxide Thin Films for Indium Tin Oxide Transparent Electrode Applications,” Thin Solid Films, Vol.516, pp.1314–1321 (2008).

[2] H. Liu et al., “Transparent Conducting Oxides for Electrode Applications in Light Emitting and Absorbing Devices,” Superlattices and Microstructures, Vol.48, pp.458–484 (2010).

[3] C. Goebbert et al., “Wet Chemical Deposition of ATO and ITO Coatings using Crystalline Nanoparticles Redispersable in Solutions,” Thin Solid Films, Vol.351, pp.79-84 (1999).

[4] Beomjin Yoo et al., “ITO/ATO/TiO2 Triple-layered Transparent Conducting Substrates for Dye-sensitized Solar Cells,” Solar Energy Materials & Solar Cells, Vol.92, pp.873– 877 (2008).

[5] G. Gruner, “Carbon Nanotube Films for Transparent and Plastic Electronics,” Journal of Materials Chemistry, Vol.16, pp.3533–3539 (2006).