利用脈衝雷射直寫技術成長奈米碳管

Carbon Nanotube Growth by Pulse Laser Direct-writing Techniques

吳昱璁(Yu-Tsung Wu)

指導教授 ： 游萃蓉

國立清華大學/工學院/材料科學工程學系/碩士(2007年)

摘要

無資料

關鍵字

準分子雷射 ； 非晶型碳膜 ； 奈米碳管

並列摘要

This work presents the formation of carbon nanotubes (CNTs) by direct-writing techniques using KrF excimer pulse laser. The pulse laser energy was applied to irradiate amorphous carbon (a-C) with Ni catalyst underneath for the transformation of carbon species into CNTs.
After various calibrations and analyses, it was found that CNTs could be synthesized successfully by this approach under proper conditions. On the other hand, it was also found an appropriate combination of pulse laser intensity and combined and a-C thickness is the key parameter to determine CNT growth.
In this work, CNTs were further grown in 9 μm via-pad using laser direct writing with I-V curve showing the ohmic behavior and metallic characteristics of CNT via-pad.

並列關鍵字

excimer laser ； amorphous carbon ； carbon nanotube

參考文獻

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