- 學位論文
微米及奈米複合式結構應用在光學膜片之研究
Micro and Nano hybrid structure applied in optical films
摘要
本研究提出以簡單的微奈米製程製作出微米以及奈米等級尺寸的複合式結構，並且利用奈米壓印技術製作在透明的高分子材料上，同時探討其光學之特性。 首先利用曝光、顯影以及蝕刻製作出微米等級尺寸的結構；再利用陽極氧化鋁製程製作出奈米等級尺寸的結構。在本研究中，利用草酸為電解液可以得到直徑為50奈米的孔洞結構；利用磷酸為電解液可以得到直徑為100奈米的孔洞結構。本研究發現利用草酸為電解液時，必須做二次處理才可以得到完整的孔洞結構。此外，利用草酸為電解液以及利用磷酸為電解液的實驗中，為了得到更整齊的孔洞結構，都進行二次處理。 完成的結構被當作模具並且利用奈米壓印成功地把結構轉移到透明的高分子材料上。壓印完成的透明高分子材料可應用為螢幕背光模組的擴散膜等光學膜。此光學膜經光學檢測後發現，比起沒有奈米結構的[空]片，其穿透率明顯地提高。
並列摘要
In this research, a micro and nano hybrid structure was realized by using simple micro and nano processing methods. Micro-structures generated by using exposure, development and etching processing; nano-sturctures were generated by using AAO processing. Two different nano-structures were fabricated using this process, 50 nm nano-pores by using oxalic acid as electrolyte and 100 nm nano-pores by using phosphoric acid as electrolyte. Furthermore, for oxalic acid, second anodization was required to obtain nano-pores, also for both oxalic acid and phosphoric acid second anodization was used to obtain more ordered nano-pores. The fabricated structures were used as molds in a nano-imprint lithography process where the structures were successfully transferred to a transparent polymer film. This transparent film can be applied to optical films such as the diffuser in a back lighting module. The imprinted samples were tested for transmittance and compared with a “blank” sample, which has no nano-structures. Obvious increment in transmittance can be observed compared with the “blank” sample.