本研究的目的在於設計一套X-ray光學感測系統,此光學系統應用於工業X-ray非破壞性瑕疵檢測之機台中,可粗分為兩階段之設計流程。 第一階段「分析現有X-ray感測器及相關光學元件之光學原理構造」﹔主要工作在於搜尋現存的X-ray感測器,分析並了解其內部所有的光學零件,其中包含閃爍晶體的光學物理特性,影像增強管的原理架構,以及各種光學設計理論,再進而在這些分析基礎上設計新型之X-ray感測器。 第二階段「設計開發新型X-ray感測器系統」根據前階段的分析所得到的基礎設計光路,針對各種不同的光學元件,進行光學模擬設計,整合閃爍晶體、影像增強管、平面鏡、透鏡、線掃瞄型照相機等各種光學元件,使其能成功擷取X-ray穿透PCB後所攜帶之資訊。再將光學模擬與實際機台之硬體限制條件進行整合分析,期望經由仔細評估及各項分析模擬的成果能給予正確且合理的參數以便進入生產製造的階段。
The purpose of this research is to design an X-ray detector, which is applied in industrial X-ray non-destructive defects inspection. This research can roughly separates into two design stages. The first stage is “Analyze the optical system of the current X-ray detector“. The prime work in this stage is searching the current X-ray detectors on the market. Then, analyze all the optical elements inside the X-ray detectors, including the physical properties of the scintillator, the working theories of the image intensifier and optical designing theories. After, we try to design a new X-ray detector base on these analyses. The second stage is “Design a new type of X-ray detector”. According to the basic optical model of the first stage, we integrate the scintillators, image intensifiers, mirrors, lens and line-scan cameras…etc to catch the information from X-ray image of the PCB. The design of the system is then using the software to find the results of optical analysis to find the optimum design of the quality of image which satisfy the requirements of the defect inspection. At last, we combine the optical simulation results and the hardware constrains to get the advisable parameters for production.