- 學位論文
以低溫多晶矽薄膜電晶體製程實現介電泳操控與感測之生醫晶片
A LTPS (Low temperature polysilicon) TFT (Thin-film transistor) Chip for Dielectrophoretic Manipulation and Bio-detection
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摘要
本研究成功地利用低溫多晶矽（LTPS，LOW TEMPERATURE POLYCRYSTALLINE SILICON）製程技術，設計並製作出一個利用介電泳力進行細胞操控之生醫感測晶片，此製程比起以CMOS製程做出的生醫晶片最大的好處之一為省去後製程這道步驟，除此之外，大面積與較低的成本都是極大的優勢，但此製程也不是這樣完好無缺點，最需要改進的就是製程的穩定度。 在本文的研究中首先詳細的介紹介電泳力的基本原理，並對其數學模型進行推導，之後利用CFD-RC模擬軟體將各項實驗條件參數帶入，可成功的設計出以介電泳力原理來操控微粒的模擬結果。而在晶片感測部份，使用在CMOS製程中發展應用成熟的3T影像感測電路來進行細胞感測，並用H-spice電路模擬軟體來進行設計驗證其可行性。最後下線回來的晶片需先在表面濺鍍一層氧化矽以進行生醫實驗，實驗結果可成功的將表面有修飾過抗體在其上的微粒以介電泳力操控在目標處並與表面有修飾抗原的晶片進行專一性抗體抗原鍵結，之後利用下方的影像感測器讀出訊號來判斷。
並列摘要
This study has successfully used LTPS TFT process technology to design a bio chip that can perform dielectrophoretic (DEP) manipulation and optical detection. The LTPS process has the benefit of less post-processing steps required than the CMOS (complementary metal oxide semiconductor) process to realize the chip. In addition, the process can provide a large chip area at low cost. Reliability, however, is the main issue that the LTPS process has to improve. The basic principle of DEP force and its mathematical model will be presented. CFD-RC software is utilized for simulation to ensure microbeads can be successfully moved to the target electrodes based on our design. Bio-detection is achieved by using image sensors. H-spice simulation is used to verify the feasibility of the circuit design. In the experiments, a thin layer of silicon dioxide is deposited on chip surface for surface functionalization and biomolecule immobilization. Immobilized microbeads can be moved to the target microelectrodes by DEP and produce specific bindings with the immobilized biomolecules on sensor surface. Those beads are successfully detected by the optical sensors underneath microelectrodes to validate the bio-recognition event.
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