- 學位論文
集束型製程設備中真空機械手臂之分析與控制
The Analysis and Control of Vacuum Robot of Cluster Tools
摘要
由於可整合多項製程模組以提高產率，集束型半導體設備(Cluster Tools)在半導體製程中逐漸成為未來主流。而真空機械手臂在集束型半導體設備中負責輸送晶圓於各個製程腔體間，因此真空機械手臂設計及控制的良窳也就越顯重要。在半導體製程高潔淨環境的需求下，真空機械手臂的傳動機構不再使用傳統方式，改為透過皮帶與皮帶輪來傳遞力矩，並配合固定的角度比例，使真空機械手臂完成傳送晶圓的動作，而又因半導體製程精度與速度的要求，如何控制真空機械手臂既正確又迅速的完成傳送動作，為本文討論的重心。 藉由Lagrange Equation，首先建立真空機械手臂的動態方程式，並於MATLAB分析軟體中建立SIMULINK模型以提供模擬。由於皮帶及諧和減速機皆對系統產生彈性的影響，並成為機械手臂振動源，本文亦針對上述振動源分別及同時存在的情況下，探討其對系統的影響。 在控制真空機械手臂方面，配合使用PID控制器及力矩回授控制法，並採用不同回授訊號的情況下，來降低振動情形及改善暫態反應。另外，利用等效彈簧擬合諧和減速機及皮帶的彈性影響，並提供合理的輸出結果，以期節省時間及人力在建構複雜的模型，及作為預測系統行為的參考。
並列摘要
Because Cluster Tools can integrate many process modules to increase the yields, it has become the main equipment gradually in semiconductor fields. In Cluster Tools, the vacuum robot is responsible for transferring the wafer between different process modules. Therefore, the design and control of the vacuum robot is very important. As a result of the need of high-degree clean environment, the transmission mechanism of vacuum robot needs to use the belt and idle wheel to replace the traditional actuators. With the specific angle proportion, the vacuum robot can still correctly complete the motion of transferring the wafer without any pollution to the environment. For studying the characteristics of vacuum robot, the dynamic equations of decomposed modules of vacuum robot such as SCARA robot module, friction module, servomotor module, harmonic drive module and belt module are formulated by Lagrange Equation respectively. Then, the dynamic equations are all built and simulated with MATLAB software. In addition, the elasticity characteristics of belt and harmonic drive are further discussed in this paper. In the aspect of control, the PID controller and force control method are both used to suppress the vibration and improve the transient response. Besides, the equivalent spring model is used to replace the harmonic drive and belts of arm for economizing the time to build the model, and predicting the behavior of robot.