- 學位論文
ITO玻璃光電性及親水性之研究
Characterization of ITO glass for its optoelectric and hydrophobic properties.
摘要
本論文是使用直流磁控濺鍍的氧化銦錫(ITO)玻璃，來研究ITO膜厚從15nm到175nm的穿透率、電阻率、薄膜干涉效應、電流熱效應等，以及探討熱退火來降低ITO玻璃的電阻率與座滴法來判定ITO表面為親水性和疏水性。 氧化銦錫(ITO)在可見光區擁有高穿透率以及低電阻率的透明導電膜，因此ITO基板，做為導電電極以應用在顯示器上。應用在觸控面板的透明導電膜需要較高的電阻率，為了得到較高的電阻率，透明導電膜的膜厚需要變得很薄，而膜厚太薄的薄膜會產生電阻率的不均勻問題。 實驗結果可知，ITO薄膜在膜厚為15nm，可達到穿透率大於91%，電阻率為2.85×10-4(Ω-cm)之ITO導電玻璃，經由熱退火290oC基板邊緣電阻率均勻度也可以逹到相當不錯的水準。
並列摘要
In this study, indium tin oxide (ITO) thin film were deposited on the glass by DC magnetron sputtering. We studied the thin-film properties of ITO that have a thin-film thickness of 15nm~175nm, transmittance, resistivity, the intervention effect and the heating effect of current. This study also examines the annealing to decrease resistivity and uses the Sessile Drop to determine hydrophobic and hydrophilic properties on the surface of ITO glass. Indium tin oxide is a transparent conducting thin film that has a highly visible transmission and low resistivity. ITO substrates were usually the conductive electrode of the display. In the touch panel applications, the transparent conductivity oxide (TCO) film requires high resistivity the TCO film should be thin; however, this has many disadvantages, including non-uniform resistivity. Experiments results demonstrate that the ITO thickness of 15nm has 91% transmittance and resistivity 2.81×10-4(Ω-cm). The uniform resistivity of the ITO substrates edge is also good under annealing temperature 290oC process condition.